Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-05-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11013097 | Apparatus and method for generating extreme ultraviolet radiation | Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2021-05-18 |