Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Han-Lung Chang, Hsiao-Lun Chang +6 more | 2021-09-28 |
| 11086225 | Lithography system and method thereof | Hsin-Feng Chen, Cheng-Hao LAI, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen +1 more | 2021-08-10 |