Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086209 | EUV lithography mask with a porous reflective multilayer structure | Chih-Tsung Shih, Li-Jui Chen, Po-Chung Cheng | 2021-08-10 |
| 10997706 | Reticle backside inspection method | Zi-Wen Chen, Po-Chung Cheng, Chih-Tsung Shih, Li-Jui Chen | 2021-05-04 |
| 10983447 | Exhaust system with u-shaped pipes | Yu-Fu Lin, Chia-Chen Chen | 2021-04-20 |