Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054756 | Apparatus and method for cleaning reticle stage | Tung-Jung Chang, Chia-Chen Chen | 2021-07-06 |
| 10983447 | Exhaust system with u-shaped pipes | Shih-Chang Shih, Chia-Chen Chen | 2021-04-20 |