Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11172566 | Droplet generator, EUV lithography device and method of generating a series of droplets using a droplet generator | Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien | 2021-11-09 |