Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092555 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2021-08-17 |
| 10928741 | Radiation source for lithography process | Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2021-02-23 |