Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158989 | Laser source device, extreme ultraviolet lithography device and method | Henry Yee Shian Tong, Wen-Chih Wang, Hsin-Liang Chen, Cheng-Chieh Chen, Li-Jui Chen +2 more | 2021-10-26 |