Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10955750 | Lithography system and method thereof | Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-03-23 |
| 10955752 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien, Sheng-Kang Yu | 2021-03-23 |