Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150564 | EUV wafer defect improvement and method of collecting nonconductive particles | Tao Chen, Li-Jui Chen | 2021-10-19 |
CL
Chia-Yu Lee
Overall (2021): #499,042 of 548,734Top 95%
1
Patents 2021