Issued Patents 2021
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10990026 | Lithography apparatus and cleaning method thereof | Chi-Ming Yang, Sheng-Ta Lin, Shang-Chieh Chien, Po-Chung Cheng | 2021-04-27 |
| 10980100 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Bo-Tsun Liu +1 more | 2021-04-13 |
| 10969690 | Extreme ultraviolet control system for adjusting droplet illumination parameters | Jen-Yang Chung, Chieh Hsieh, Shang-Chieh Chien, Po-Chung Cheng | 2021-04-06 |
| 10962881 | Method and apparatus for lithography in semiconductor fabrication | Cheng-Kuan Wu, Po-Chung Cheng, Chih-Tsung Shih | 2021-03-30 |
| 10955752 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Po-Chung Cheng, Shang-Chieh Chien, Sheng-Kang Yu, Wei-Chun Yen | 2021-03-23 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2021-03-23 |
| 10955750 | Lithography system and method thereof | Wei-Chun Yen, Chi-Ming Yang, Shang-Chieh Chien, Po-Chung Cheng | 2021-03-23 |
| 10942459 | Lithography system and cleaning method thereof | Sheng-Ta Lin, Shang-Chieh Chien | 2021-03-09 |
| 10928741 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Bo-Tsun Liu, Po-Chung Cheng | 2021-02-23 |
| 10925142 | EUV radiation source for lithography exposure process | Chun-Chia Hsu, Kuan-Hung Chen, Shang-Chieh Chien, Po-Chung Cheng | 2021-02-16 |
| 10917959 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Po-Chung Cheng | 2021-02-09 |