Issued Patents All Time
Showing 101–125 of 137 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544804 | Semiconductor wafer having identification indication and method of manufacturing the same | Katsuya Okumura | 2003-04-08 |
| 6454819 | Composite particles and production process thereof, aqueous dispersion, aqueous dispersion composition for chemical mechanical polishing, and process for manufacture of semiconductor device | Gaku Minamihaba, Yukiteru Matsui, Katsuya Okumura, Masayuki Motonari, Masayuki Hattori +1 more | 2002-09-24 |
| 6444139 | Slurry for CMP and CMP method | Gaku Minamihaba | 2002-09-03 |
| 6429134 | Method of manufacturing semiconductor device | Takeo Kubota, Kenro Nakamura | 2002-08-06 |
| 6414499 | Method for monitoring the shape of the processed surfaces of semiconductor devices and equipment for manufacturing the semiconductor devices | Katsuya Okumura | 2002-07-02 |
| 6409780 | Water-laden solid matter of vapor-phase processed inorganic oxide particles and slurry for polishing and manufacturing method of semiconductor devices | Nobuo Hayasaka, Katsuya Okumura, Akira Iio, Masayuki Hattori, Kiyonobu Kubota | 2002-06-25 |
| 6375545 | Chemical mechanical method of polishing wafer surfaces | Gaku Minamihaba, Yukiteru Matsui, Nobuo Hayasaka, Katsuya Okumura, Akira Iio +2 more | 2002-04-23 |
| 6337280 | Polishing cloth and method of manufacturing semiconductor device using the same | — | 2002-01-08 |
| 6312321 | Polishing apparatus | Dai Fukushima, Gaku Minamihaba | 2001-11-06 |
| 6306669 | Method of manufacturing semiconductor device | Katsuya Okumura | 2001-10-23 |
| 6268641 | Semiconductor wafer having identification indication and method of manufacturing the same | Katsuya Okumura | 2001-07-31 |
| 6239032 | Polishing method | Kenro Nakamura | 2001-05-29 |
| 6069081 | Two-step chemical mechanical polish surface planarization technique | Kathryn Helen Kelleher, Matthias Peschke | 2000-05-30 |
| 5954570 | Conditioner for a polishing tool | Katsuya Okumura, Norio Kimura, Noburu Shimizu | 1999-09-21 |
| 5948205 | Polishing apparatus and method for planarizing layer on a semiconductor wafer | Masako Kodera, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima, Haruo Okano | 1999-09-07 |
| 5914275 | Polishing apparatus and method for planarizing layer on a semiconductor wafer | Masako Kodera, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima, Haruo Okano | 1999-06-22 |
| 5899524 | Sliding roof assembly | Keiji Mori | 1999-05-04 |
| 5876273 | Apparatus for polishing a wafer | Katsuya Okumura, Norio Kimura, Tomoyuki Yahiro, Hozumi Yasuda | 1999-03-02 |
| 5775980 | Polishing method and polishing apparatus | Yasutaka Sasaki, Mie Matsuo, Rempei Nakata, Junichi Wada, Nobuo Hayasaka +1 more | 1998-07-07 |
| 5733713 | Method of manufacturing semiconductor device | Haruo Okano, Tohru Watanabe, Keiji Horioka | 1998-03-31 |
| 5721173 | Method of forming a shallow trench isolation structure | Katsuya Okumura | 1998-02-24 |
| 5707487 | Method of manufacturing semiconductor device | Masaru Hori, Keiji Horioka, Haruo Okano | 1998-01-13 |
| 5664827 | Sun-roof device | Keiji Mori, Kenji Hori, Katsuaki Kadoike | 1997-09-09 |
| 5633207 | Method of forming a wiring layer for a semiconductor device | Katsuya Okumura | 1997-05-27 |
| 5607718 | Polishing method and polishing apparatus | Yasutaka Sasaki, Mie Matsuo, Rempei Nakata, Junichi Wada, Nobuo Hayasaka +1 more | 1997-03-04 |