Issued Patents All Time
Showing 126–137 of 137 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5597341 | Semiconductor planarizing apparatus | Masako Kodera, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima, Haruo Okano | 1997-01-28 |
| 5593537 | Apparatus for processing semiconductor wafers | William J. Cote, James Ryan, Katsuya Okumura | 1997-01-14 |
| 5578531 | Method for manufacturing semiconductor device | Masako Kodera, Atsushi Shigeta | 1996-11-26 |
| 5534106 | Apparatus for processing semiconductor wafers | William J. Cote, James Ryan, Katsuya Okumura | 1996-07-09 |
| 5483568 | Pad condition and polishing rate monitor using fluorescence | Katsuya Okumura | 1996-01-09 |
| 5445710 | Method of manufacturing semiconductor device | Masaru Hori, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo, Haruo Okano +3 more | 1995-08-29 |
| 5445996 | Method for planarizing a semiconductor device having a amorphous layer | Masako Kodera, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima, Haruo Okano | 1995-08-29 |
| 5437961 | Method of manufacturing semiconductor device | Haruo Okano, Tohru Watanabe, Keiji Horioka | 1995-08-01 |
| 5398459 | Method and apparatus for polishing a workpiece | Katsuya Okumura, Tohru Watanabe, Riichirou Aoki, Masako Kodera, Atsushi Shigeta +4 more | 1995-03-21 |
| 5302240 | Method of manufacturing semiconductor device | Masaru Hori, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo, Haruo Okano +3 more | 1994-04-12 |
| 5241230 | Cooling fan with reduced noise capability in an AC generator | Toshinori Tanaka, Yutaka Kitamura, Kazuo Matsunaga | 1993-08-31 |
| 5240554 | Method of manufacturing semiconductor device | Masaru Hori, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo, Haruo Okano | 1993-08-31 |