Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7498294 | Cleaning composition, method for cleaning semiconductor substrate, and process for manufacturing semiconductor device | Tomohisa Konno, Masayuki Hattori, Nobuo Kawahashi | 2009-03-03 |
| 7378349 | Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method | Tomohisa Konno, Hirotaka Shida, Masayuki Hattori, Nobuo Kawahashi | 2008-05-27 |
| 6527818 | Aqueous dispersion for chemical mechanical polishing | Masayuki Hattori, Kazuo Nishimoto, Nobuo Kawahashi | 2003-03-04 |
| 6409780 | Water-laden solid matter of vapor-phase processed inorganic oxide particles and slurry for polishing and manufacturing method of semiconductor devices | Hiroyuki Yano, Nobuo Hayasaka, Katsuya Okumura, Akira Iio, Masayuki Hattori | 2002-06-25 |
| 4547200 | Slurry composition of solid fuel | Hironobu Shinohara, Yoshinori Yoshida | 1985-10-15 |