| 8574330 |
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method for semiconductor device |
Yuuji Namie, Masayuki Motonari, Hirotaka Shida, Akihiro Takemura |
2013-11-05 |
| 8524606 |
Chemical mechanical planarization with overburden mask |
Leslie M. Charns, John M. Cotte, Jason E. Cummings, Lukasz J. Hupka, Dinesh R. Koli +6 more |
2013-09-03 |
| 8513127 |
Chemical mechanical planarization processes for fabrication of FinFET devices |
Josephine B. Chang, Leslie M. Charns, Jason E. Cummings, Michael A. Guillorn, Lukasz J. Hupka +7 more |
2013-08-20 |
| 8507383 |
Fabrication of replacement metal gate devices |
Takashi Ando, Leslie M. Charns, Jason E. Cummings, Lukasz J. Hupka, Dinesh R. Koli +6 more |
2013-08-13 |
| 8497210 |
Shallow trench isolation chemical mechanical planarization |
Leslie M. Charns, Jason E. Cummings, Lukasz J. Hupka, Dinesh R. Koli, Mahadevaiyer Krishnan +5 more |
2013-07-30 |
| 7498294 |
Cleaning composition, method for cleaning semiconductor substrate, and process for manufacturing semiconductor device |
Kiyonobu Kubota, Masayuki Hattori, Nobuo Kawahashi |
2009-03-03 |
| 7378349 |
Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method |
Hirotaka Shida, Kiyonobu Kubota, Masayuki Hattori, Nobuo Kawahashi |
2008-05-27 |
| 7183211 |
Process for chemical mechanical polishing of semiconductor substrate and aqueous dispersion for chemical mechanical polishing |
Masayuki Motonari, Masayuki Hattori, Nobuo Kawahashi |
2007-02-27 |
| 6977286 |
Crosslinked rubber particles and rubber compositions |
Toshihiro Tadaki, Yoshiyuki Udagawa, Hiroshi Akema |
2005-12-20 |
| 6832949 |
Window member for chemical mechanical polishing and polishing pad |
Masayuki Motonari, Masayuki Hattori, Kou Hasegawa, Nobuo Kawahashi |
2004-12-21 |
| 6747095 |
Crosslinked rubber particles and rubber compositions |
Toshihiro Tadaki, Yoshiyuki Udagawa, Hiroshi Akema |
2004-06-08 |
| 6740704 |
Methods for producing diene-based rubber/inorganic compound complexes and rubber compositions containing the same |
Yoshiyuki Udagawa, Toshihiro Tadaki |
2004-05-25 |
| 6727307 |
Rubber composition |
Hajime Kondo, Kazuhiro Yanagisawa, Yoshiyuki Udagawa, Toshihiro Tadaki |
2004-04-27 |
| 6703470 |
Conjugated diene-based rubber, oil extended rubber and rubber composition containing the same |
Yoshiyuki Udagawa, Toshihiro Tadaki |
2004-03-09 |
| 6699935 |
Rubber composition |
Hiroshi Akema, Toshihiro Tadaki, Yoshiyuki Udagawa, Takafumi Fueki, Hajime Kondou |
2004-03-02 |
| 6653404 |
Rubber compositions |
Toshihiro Tadaki, Yoshiyuki Udagawa, Hiroshi Akema |
2003-11-25 |
| 6562929 |
Conjugated diene-based rubber and method of producing the same, oil extended rubber and rubber composition containing the same |
Yoshiyuki Udagawa, Toshihiro Tadaki |
2003-05-13 |
| 6559219 |
Rubber compositions |
Toshihiro Tadaki, Yoshiyuki Udagawa, Hiroshi Akema |
2003-05-06 |
