Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400383 | Training method for learning apparatus, and image generation system | Yasutaka Toyoda, Hideto Dohi, Hiroya Ohta, Hideyuki Kazumi | 2025-08-26 |
| 12340970 | Charged particle beam device, and method for controlling charged particle beam device | Shingo Hayashi, Hideyuki Kazumi, Hideto Dohi | 2025-06-24 |
| 12327708 | Charged particle beam device and aberration correction method | Shingo Hayashi, Hideto Dohi, Hideyuki Kazumi | 2025-06-10 |
| 11769649 | Multipole unit and charged particle beam device | Masanori Mita, Yoshinobu OOTAKA, Hideto Dohi | 2023-09-26 |
| 11223486 | Digital signature method, device, and system | Feng Du | 2022-01-11 |
| 10840060 | Scanning electron microscope and sample observation method | Hikaru Koyama, Yoshinobu Kimura, Hiroyuki Shinada, Osamu Komuro | 2020-11-17 |
| 10727024 | Charged particle beam device and aberration correction method for charged particle beam device | Kotoko Urano, Takeyoshi Ohashi, Hideyuki Kazumi | 2020-07-28 |
| 10446361 | Aberration correction method, aberration correction system, and charged particle beam apparatus | Tomonori Nakano, Kotoko Urano, Takeyoshi Ohashi, Yasunari Sohda, Hideyuki Kazumi | 2019-10-15 |
| 9991092 | Scanning electron microscope and sample observation method | Hikaru Koyama, Yoshinobu Kimura, Hiroyuki Shinada, Osamu Komuro | 2018-06-05 |
| 9830524 | Method for estimating shape before shrink and CD-SEM apparatus | Tomoko Sekiguchi, Takeyoshi Ohashi, Junichi Tanaka, Ruriko Tsuneta, Hiroki Kawada +1 more | 2017-11-28 |
| 9287084 | Aberration corrector and charged particle beam apparatus using the same | Hideo Kashima, Hiroaki Baba, Takeyoshi Ohashi, Tomonori Nakano, Kotoko Urano +1 more | 2016-03-15 |
| 9202665 | Charged particle beam apparatus for removing charges developed on a region of a sample | Hiroyuki Matsui, Osamu Komuro, Makoto Nishihara | 2015-12-01 |
| 8309923 | Sample observing method and scanning electron microscope | Seiko Omori, Hideyuki Kazumi | 2012-11-13 |
| 8207513 | Charged particle beam apparatus | Yuko Sasaki, Yasuhiro Gunji | 2012-06-26 |
| 7928384 | Localized static charge distribution precision measurement method and device | Tasuku Yano, Seiko Omori | 2011-04-19 |
| 7910884 | Apparatus and method for inspection and measurement | Natsuki Tsuno | 2011-03-22 |
| 7714288 | Charged particle beam apparatus | Tasuku Yano, Takashi Furukawa, Osamu Nasu | 2010-05-11 |
| 7683319 | Charge control apparatus and measurement apparatus equipped with the charge control apparatus | Hiroshi Makino, Kenji Tanimoto, Hideo Todokoro | 2010-03-23 |
| 7655906 | Method and apparatus for scanning and measurement by electron beam | Hiroshi Makino, Hikaru Koyama, Mitsugu Sato | 2010-02-02 |
| 7652248 | Inspection apparatus and inspection method | Hiroshi Makino, Kenji Tanimoto, Hikaru Koyama | 2010-01-26 |
| 7633303 | Semiconductor wafer inspection apparatus | Takashi Furukawa, Natsuki Tsuno | 2009-12-15 |
| 7547884 | Pattern defect inspection method and apparatus thereof | Masaki Hasegawa, Hiroshi Makino, Hikaru Koyama, Hisaya Murakoshi | 2009-06-16 |
| 7394070 | Method and apparatus for inspecting patterns | Mari Nozoe, Yasunori Goto | 2008-07-01 |
| 7218126 | Inspection method and apparatus for circuit pattern | Mari Nozoe | 2007-05-15 |
| 6952105 | Inspection method and apparatus for circuit pattern of resist material | Mari Nozoe | 2005-10-04 |