Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266509 | Multilayer coatings of component parts for a work piece processing chamber | Paul Konkola, Ramesh Chandrasekharan, Andrew H. Breninger | 2025-04-01 |
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Krishna Birru +11 more | 2025-02-18 |
| 12191120 | Multilayer coating for corrosion resistance | Amir H. TAVAKOLI, Peter Reimer, David Jorgensen | 2025-01-07 |
| 12163219 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Krishna Birru +11 more | 2024-12-10 |
| 11365479 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Krishna Birru +11 more | 2022-06-21 |
| 10760158 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Krishna Birru +11 more | 2020-09-01 |
| 10217614 | Ceramic gas distribution plate with embedded electrode | Jeremy Tucker, Ramkishan Rao Lingampalli | 2019-02-26 |
| 9202736 | Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing | Kadthala Ramaya Narendrnath, Dmitry Lubomirsky, Xinglong Chen, Sudhir Gondhalekar, Muhammad M. Rasheed | 2015-12-01 |
| 8108981 | Method of making an electrostatic chuck with reduced plasma penetration and arcing | Dmitry Lubomirsky, Kadthala Ramaya Narendranath, Xinglong Chen, Sudhir Gondhalekar, Muhammad M. Rasheed | 2012-02-07 |
| 7848076 | Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing | Kadthala Ramaya Narendranath, Dmitry Lubomirsky, Xinglong Chen, Sudhir Goodhalekar, Muhammad M. Rasheed | 2010-12-07 |
| 7670688 | Erosion-resistant components for plasma process chambers | You Wang, Ananda H. Kumar | 2010-03-02 |
| 6960521 | Method and apparatus for polishing metal and dielectric substrates | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana +6 more | 2005-11-01 |
| 6824748 | Heated catalytic treatment of an effluent gas from a substrate fabrication process | Shamouil Shamouilian, Harshad Borgaonkar, Kwok Manus Wong, Michael G. Chafin, Ashish Bhatnagar | 2004-11-30 |
| 6790768 | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects | Yongsik Moon, David H. Mai, Kapila Wijekoon, Rajeev Bajaj, Rahul Surana +6 more | 2004-09-14 |
| 6789498 | Elements having erosion resistance | Chuong Q. Dam, Daniel Ashkin | 2004-09-14 |
| 6709314 | Chemical mechanical polishing endpoinat detection | Chuong Q. Dam, Yongqi Hu | 2004-03-23 |
| 6689252 | Abatement of hazardous gases in effluent | Shamouil Shamouilian | 2004-02-10 |
| 6673323 | Treatment of hazardous gases in effluent | Ashish Bhatnagar, Kwok Manus Wong, Shamouil Shamouilian | 2004-01-06 |
| 6490145 | Substrate support pedestal | Arnold Kholodenko, You Wang, Semyon L. Kats | 2002-12-03 |
| 6468490 | Abatement of fluorine gas from effluent | Shamouil Shamouilian, Mehran Moalem | 2002-10-22 |
| 6391146 | Erosion resistant gas energizer | Ashish Bhatnagar, Kartik Ramaswamy, Kwok Manus Wong, Shamouil Shamouilian | 2002-05-21 |
| 6367412 | Porous ceramic liner for a plasma source | Kartik Ramaswamy, Kwok Manus Wong, Ashish Bhatnagar, Mehran Moalem, Shamouil Shamouilian | 2002-04-09 |
| 5137789 | Composite ceramic and metal article | — | 1992-08-11 |