Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12110584 | Low temperature growth of transition metal chalcogenides | Chandan Das, Bhaskar Jyoti Bhuyan, John Sudijono, Abhijit Basu Mallick, Mark Saly | 2024-10-08 |
| 12046468 | Conformal silicon-germanium film deposition | Huiyuan Wang, Abhijit Basu Mallick | 2024-07-23 |
| 12018364 | Super-conformal germanium oxide films | Huiyuan Wang, Takehito Koshizawa, Bo Qi, Abhijit Basu Mallick | 2024-06-25 |
| 11781218 | Defect free germanium oxide gap fill | Huiyuan Wang, Takehito Koshizawa, Bo Qi, Abhijit Basu Mallick | 2023-10-10 |
| 11594415 | PECVD tungsten containing hardmask films and methods of making | Pramit Manna, Rui Cheng, Abhijit Basu Mallick | 2023-02-28 |
| 11462438 | Volumetric expansion of metal-containing films by silicidation | Srinivas Gandikota, Abhijit Basu Mallick, Amrita B. Mullick | 2022-10-04 |
| 11437274 | Fully self-aligned via | Regina Freed, Madhur Sachan, Gabriela Alva, Ho-yung David Hwang, Uday Mitra +4 more | 2022-09-06 |
| 11437273 | Self-aligned contact and contact over active gate structures | Yuriy Shusterman, Madhur Sachan, Regina Freed, Sanjay Natarajan | 2022-09-06 |
| 11414751 | Self-aligned structures from sub-oxides | Srinivas Gandikota, Abhijit Basu Mallick | 2022-08-16 |
| 11328928 | Conformal high concentration boron doping of semiconductors | Srinivas Gandikota, Abhijit Basu Mallick, Swaminathan Srinivasan, Rui Cheng, Gaurav Thareja +2 more | 2022-05-10 |
| 11315943 | Bottom-up approach to high aspect ratio hole formation in 3D memory structures | Praburam Gopalraja, Abhijit Basu Mallick, Srinivas Gandikota | 2022-04-26 |
| 11289374 | Nucleation-free gap fill ALD process | Yihong Chen, Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Yong Wu +1 more | 2022-03-29 |
| 11232955 | Methods of etching metal oxides with less etch residue | Amrita B. Mullick, Abhijit Basu Mallick, Srinivas Gandikota, Yingli Rao, Regina Freed +1 more | 2022-01-25 |
| 11177174 | Selective deposition of carbon films and uses thereof | Abhijit Basu Mallick | 2021-11-16 |
| 11177164 | Self-aligned high aspect ratio structures and methods of making | Praburam Gopalraja, Abhijit Basu Mallick, Srinivas Gandikota | 2021-11-16 |
| 11171047 | Fluorine-doped nitride films for improved high-k reliability | Yixiong Yang, Srinivas Gandikota, Steven C. H. Hung, Jacqueline S. Wrench, Yongjing Lin +2 more | 2021-11-09 |
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Ziqing Duan +3 more | 2021-08-17 |
| 11069568 | Ultra-thin diffusion barriers | Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota | 2021-07-20 |
| 10998195 | Metal and metal-derived films | Yingli Rao, Srinivas Gandikota | 2021-05-04 |
| 10950498 | Selective and self-limiting tungsten etch process | Srinivas Gandikota, Pramit Manna, Abhijit Basu Mallick | 2021-03-16 |
| 10930493 | Linerless continuous amorphous metal films | Yong Wu, Srinivas Gandikota | 2021-02-23 |
| 10840186 | Methods of forming self-aligned vias and air gaps | Ziqing Duan, Abhijit Basu Mallick, Praburam Gopalraja | 2020-11-17 |
| 10741435 | Oxidative volumetric expansion of metals and metal containing compounds | Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Srinivas Gandikota, Pramit Manna | 2020-08-11 |
| 10622221 | Methods of etching metal oxides with less etch residue | Amrita B. Mullick, Abhijit Basu Mallick, Srinivas Gandikota, Yingli Rao, Regina Freed +1 more | 2020-04-14 |
| 10600684 | Ultra-thin diffusion barriers | Yihong Chen, Abhijit Basu Mallick, Srinivas Gandikota | 2020-03-24 |