Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971340 | Gas injector for reaction regions | — | 2021-04-06 |
| 9570581 | Method of forming a self-aligned stack gate structure for use in a non-volatile memory array | Willem-Jan Toren, Xian Liu, Gerhard Metzger-Brueckl, Nhan Do, Nadia Miridi +7 more | 2017-02-14 |
| 9330922 | Self-aligned stack gate structure for use in a non-volatile memory array and a method of forming such structure | Willem-Jan Toren, Xian Liu, Gerhard Metzger-Brueckl, Nhan Do, Nadia Miridi +7 more | 2016-05-03 |
| 7879395 | Method of preparing a coating solution and a corresponding use of the coating solution for coating a substrate | Andreas Klipp, Tobias Mayer-Uhma, Cornelia Klein, Alexander Michaelis, Falko Schlenkrich | 2011-02-01 |
| 7846846 | Method of preventing etch profile bending and bowing in high aspect ratio openings by treating a polymer formed on the opening sidewalls | Kallol Bera, Kenny L. Doan, Subhash Deshmukh | 2010-12-07 |
| 7737049 | Method for forming a structure on a substrate and device | Dirk Manger, Rolf Weis, Christoph Noelscher | 2010-06-15 |
| 7544270 | Apparatus for processing a substrate | Roger Wolf | 2009-06-09 |
| 7368390 | Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process | Guenther Czech, Carsten Fuelber, Markus Kirchhoff, Maik Stegemann, Mirko Vogt | 2008-05-06 |
| 7265023 | Fabrication method for a semiconductor structure | Moritz Haupt, Andreas Klipp, Hans-Peter Sperlich, Momtchill Stavrev | 2007-09-04 |
| 7141507 | Method for production of a semiconductor structure | Oliver Genz, Markus Kirchhoff, Stephan Machill, Alexander Reb, Barbara Schmidt +2 more | 2006-11-28 |
| 7105404 | Method for fabricating a semiconductor structure | Mihel Seitz | 2006-09-12 |
| 7037777 | Process for producing an etching mask on a microstructure, in particular a semiconductor structure with trench capacitors, and corresponding use of the etching mask | Hans-Peter Moll, Momtchil Stavrev, Mirko Vogt | 2006-05-02 |
| 6919269 | Production method for a semiconductor component | Manfred Schneegans, Wolfgang Jager, Ulrike Bewersdorff-Sarlette | 2005-07-19 |
| 6897155 | Method for etching high-aspect-ratio features | Ajay Kumar, Anisul Khan, Dragan Podlesnik, Sharma Pamarthy, Axel Henke +1 more | 2005-05-24 |
| 6821894 | CMP process | Peter Lahnor | 2004-11-23 |
| 6693022 | CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures | Joerg Dreybrodt, Dirk Drescher, Ralf Zedlitz | 2004-02-17 |
| 6596625 | Method and device for producing a metal/metal contact in a multilayer metallization of an integrated circuit | Martin Schneegans | 2003-07-22 |
| 6583020 | Method for fabricating a trench isolation for electrically active components | Ines Uhlig, Jens Zimmermann | 2003-06-24 |
| 6541372 | Method for manufacturing a conductor structure for an integrated circuit | Peter Moll | 2003-04-01 |
| 6511918 | Method of structuring a metal-containing layer | Kerstin Krahl | 2003-01-28 |
| 6479373 | Method of structuring layers with a polysilicon layer and an overlying metal or metal silicide layer using a three step etching process with fluorine, chlorine, bromine containing gases | Joerg Dreybrodt, Dirk Drescher, Ralf Zedlitz | 2002-11-12 |
| 6436731 | Method of producing a semiconductor device comprising a cleaning process for removing silicon-containing material | Achim Neu, Volker Strutz, Rudiger Uhlmann | 2002-08-20 |
| 6380076 | Dielectric filling of electrical wiring planes | Markus Kirchhoff, Michael Rogalli | 2002-04-30 |
| 6380074 | Deposition of various base layers for selective layer growth in semiconductor production | Markus Kirchhoff, Hans-Peter Sperlich, Uwe Schilling, Zvonimir Gabric, Oswald Spindler +1 more | 2002-04-30 |
| 6177353 | Metallization etching techniques for reducing post-etch corrosion of metal lines | Martin Gutsche, Peter Strobl, Eike Lueken, Georg Stojakovic, Bruno Spuler | 2001-01-23 |