Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960541 | Process for fabrication of a semiconductor component having a tungsten oxide layer | Helmut Tews, Martin Schrems, Helmut Wurzer | 2005-11-01 |
| 6781180 | Trench capacitor and method for fabricating the same | Schrems Martin, Helmut Wurzer, Wolfram Karcher | 2004-08-24 |
| 6693022 | CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures | Joerg Dreybrodt, Ralf Zedlitz, Stephan Wege | 2004-02-17 |
| 6479373 | Method of structuring layers with a polysilicon layer and an overlying metal or metal silicide layer using a three step etching process with fluorine, chlorine, bromine containing gases | Joerg Dreybrodt, Ralf Zedlitz, Stephan Wege | 2002-11-12 |