Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6693022 | CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures | Dirk Drescher, Ralf Zedlitz, Stephan Wege | 2004-02-17 |
| 6479373 | Method of structuring layers with a polysilicon layer and an overlying metal or metal silicide layer using a three step etching process with fluorine, chlorine, bromine containing gases | Dirk Drescher, Ralf Zedlitz, Stephan Wege | 2002-11-12 |