Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7368390 | Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process | Guenther Czech, Markus Kirchhoff, Maik Stegemann, Mirko Vogt, Stephan Wege | 2008-05-06 |