Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8470173 | Column packing apparatus and method of making and using the same | Juergen Maier-Rosenkranz, Jochen Saar | 2013-06-25 |
| 7141507 | Method for production of a semiconductor structure | Markus Kirchhoff, Stephan Machill, Alexander Reb, Barbara Schmidt, Momtchil Stavrev +2 more | 2006-11-28 |
| 7049228 | Method for introducing structures which have different dimensions into a substrate | Ulrich Baier | 2006-05-23 |
| 7046363 | Optical measurement system and method | Alexander Michaelis, Ulrich Mantz | 2006-05-16 |
| 7018781 | Method for fabricating a contact hole plane in a memory module | Hans-Georg Fröhlich, Werner Graf, Stefan Gruss, Matthias Handke, Percy Heger +6 more | 2006-03-28 |
| 6809800 | Apparatus for patterning a semiconductor wafer | Jurgen Preuninger, Gerhard Kunkel | 2004-10-26 |
| 6740594 | Method for removing carbon-containing polysilane from a semiconductor without stripping | Zhijian Lu | 2004-05-25 |
| 6670235 | Process flow for two-step collar in DRAM preparation | Helmut Tews, Stephan Kudelka | 2003-12-30 |
| 6558883 | Apparatus and method for patterning a semiconductor wafer | Jurgen Preuninger, Gerhard Kunkel | 2003-05-06 |
| 6387771 | Low temperature oxidation of conductive layers for semiconductor fabrication | Alexander Michaelis | 2002-05-14 |
| 6352893 | Low temperature self-aligned collar formation | Alexander Michaelis, Stephan Kudelka, Jochen Beintner | 2002-03-05 |
| 6031614 | Measurement system and method for measuring critical dimensions using ellipsometry | Alexander Michaelis, Ulrich Mantz | 2000-02-29 |