Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809800 | Apparatus for patterning a semiconductor wafer | Oliver Genz, Gerhard Kunkel | 2004-10-26 |
| 6558883 | Apparatus and method for patterning a semiconductor wafer | Oliver Genz, Gerhard Kunkel | 2003-05-06 |