Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7229928 | Method for processing a layered stack in the production of a semiconductor device | — | 2007-06-12 |
| 7049228 | Method for introducing structures which have different dimensions into a substrate | Oliver Genz | 2006-05-23 |
| 6869886 | Process for etching a metal layer system | Jens Bachmann, Falko Höhnsdorf | 2005-03-22 |
| 6756314 | Method for etching a hard mask layer and a metal layer | — | 2004-06-29 |