Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6869886 | Process for etching a metal layer system | Jens Bachmann, Ulrich Baier | 2005-03-22 |
| 6864170 | Compact semiconductor structure | Albrecht Kieslich, Detlef Weber | 2005-03-08 |
| 6750140 | Process for producing contact holes on a metallization structure | — | 2004-06-15 |