| 12148149 |
Training a machine learning system to detect an excursion of a CMP component using time-based sequence of images |
Thomas Li, Benjamin Cherian |
2024-11-19 |
| 12079984 |
Detecting an excursion of a CMP component using time-based sequence of images |
Thomas Li, Benjamin Cherian |
2024-09-03 |
| 11850703 |
Method of forming retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2023-12-26 |
| 11710228 |
Detecting an excursion of a CMP component using time-based sequence of images and machine learning |
Thomas Li, Benjamin Cherian |
2023-07-25 |
| 11577361 |
Retaining ring with shaped surface and method of forming |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2023-02-14 |
| 11260500 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2022-03-01 |
| 10766117 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2020-09-08 |
| 10651098 |
Polishing with measurement prior to deposition of outer layer |
Tomohiko Kitajima, Jeffrey Drue David, Jun Qian, Taketo Sekine, Garlen C. Leung |
2020-05-12 |
| 9937601 |
Retaining ring with Shaped Surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2018-04-10 |
| 9811077 |
Polishing with pre deposition spectrum |
Tomohiko Kitajima, Jeffrey Drue David, Jun Qian, Taketo Sekine, Garlen C. Leung |
2017-11-07 |
| 9362186 |
Polishing with eddy current feed meaurement prior to deposition of conductive layer |
Tomohiko Kitajima, Jeffrey Drue David, Jun Qian, Taketo Sekine, Garlen C. Leung |
2016-06-07 |
| 9186773 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2015-11-17 |
| 8585468 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2013-11-19 |
| 8372210 |
Post CMP scrubbing of substrates |
Garrett H. Sin, Terry Kin Ting Ko |
2013-02-12 |
| 8066551 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2011-11-29 |
| 7952708 |
High throughput measurement system |
Abraham Ravid, Boguslaw A. Swedek, Dominic J. Benvegnu, Jeffrey Drue David, Jun Qian +3 more |
2011-05-31 |
| 7927190 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2011-04-19 |
| 7840375 |
Methods and apparatus for generating a library of spectra |
Abraham Ravid, Boguslaw A. Swedek, Dominic J. Benvegnu, Jeffrey Drue David, Jun Qian +3 more |
2010-11-23 |
| 6592438 |
CMP platen with patterned surface |
Robert D. Tolles, Steven T. Mear, Gopalakrishna B. Prabhu, Fred C. Redeker |
2003-07-15 |
| 6527624 |
Carrier head for providing a polishing slurry |
Robert D. Tolles |
2003-03-04 |
| 6361405 |
Utility wafer for chemical mechanical polishing |
Jeffrey Drue David, Benjamin A. Bonner, Thomas H. Osterheld |
2002-03-26 |
| 6322427 |
Conditioning fixed abrasive articles |
Shijian Li, Ramin Emami, Fritz Redeker, John M. White |
2001-11-27 |
| 6283840 |
Cleaning and slurry distribution system assembly for use in chemical mechanical polishing apparatus |
— |
2001-09-04 |
| 6220941 |
Method of post CMP defect stability improvement |
Boris Fishkin, Charles C. Garretson, Peter McKeever, Thomas H. Osterheld, Gopalakrishna B. Prabhu +2 more |
2001-04-24 |
| 6220942 |
CMP platen with patterned surface |
Robert D. Tolles, Steven T. Mear, Gopalakrishna B. Prabhu, Fred C. Redeker |
2001-04-24 |
