Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428731 | Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability | Zuoming ZHU, Ala Moradian, John Tolle, Manjunath Subbanna, Martin Jeffrey Salinas +3 more | 2025-09-30 |
| 12428753 | Lift assemblies, and related methods and components, for substrate processing chambers | Aniketnitin PATIL, Raja Murali DHAMODHARAN, Martin Jeffrey Salinas | 2025-09-30 |
| 12324061 | Epitaxial deposition chamber | Brian H. Burrows, Zhiyuan Ye, Richard O. Collins, Enle CHOO, Danny D. WANG +5 more | 2025-06-03 |
| 12261062 | Spot heating by moving a beam with horizontal rotary motion | Toshiyuki Nakagawa, Zhiyuan Ye | 2025-03-25 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG, Maxim D. SHAPOSHNIKOV +10 more | 2025-01-14 |
| 12188148 | Multi-layer EPI chamber body | Zhiyuan Ye, Richard O. Collins, Brian H. Burrows | 2025-01-07 |
| 12163229 | Multi zone spot heating in EPI | Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye, Joseph M. Ranish +3 more | 2024-12-10 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG, Vilen K. NESTOROV +10 more | 2024-12-10 |
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Brian H. Burrows, Lori D. Washington, Herman Diniz, Martin A. Hilkene +4 more | 2024-07-16 |
| 12033874 | EPI chamber with full wafer laser heating | Adel George Tannous, Patrick C. Genis, Zhiyuan Ye | 2024-07-09 |
| 11842907 | Spot heating by moving a beam with horizontal rotary motion | Toshiyuki Nakagawa, Zhiyuan Ye | 2023-12-12 |
| 11821088 | Multi zone spot heating in EPI | Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye, Joseph M. Ranish +3 more | 2023-11-21 |
| 11807931 | Chamber injector | Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong, Nyi O. Myo +1 more | 2023-11-07 |
| 11680338 | Linear lamp array for improved thermal uniformity and profile control | Brian H. Burrows, Zhiyuan Ye | 2023-06-20 |
| 11492704 | Chamber injector | Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong, Nyi O. Myo +1 more | 2022-11-08 |
| 11261538 | In-situ temperature mapping for epi chamber | Ala Moradian, Zuoming ZHU, Patricia M. Liu, Flora Fong-Song CHANG, Enle CHOO +1 more | 2022-03-01 |
| 11177144 | Wafer spot heating with beam width modulation | Zhiyuan Ye, Zuoming ZHU, Koji Nakanishi, Toshiyuki Nakagawa, Nyi O. Myo +1 more | 2021-11-16 |
| 11060203 | Liner for epi chamber | Mehmet Tugrul Samir, Aaron Miller | 2021-07-13 |
| 11021795 | Multi zone spot heating in epi | Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye, Joseph M. Ranish +3 more | 2021-06-01 |
| 10995419 | Methods and apparatus for gallium nitride deposition | Brian H. Burrows, Ala Moradian, Kartik Shah | 2021-05-04 |
| 10770319 | EPI thickness tuning by pulse or profile spot heating | Zhiyuan Ye, Zuoming ZHU, Nyi O. Myo, Errol Antonio C. Sanchez, Schubert S. Chu | 2020-09-08 |
| 10760161 | Inject insert for EPI chamber | Mehmet Tugrul Samir, Aaron Miller | 2020-09-01 |
| 10453733 | Substrate transfer mechanisms | Masato Ishii, Mehmet Tugrul Samir, Jeffrey Tobin | 2019-10-22 |
| 10170342 | Flow controlled liner having spatially distributed gas passages | Mehmet Tugrul Samir | 2019-01-01 |
| 10132003 | Heating modulators to improve epi uniformity tuning | Surajit Kumar, Joseph M. Ranish, Zhiyuan Ye, Kartik Shah, Mehmet Tugrul Samir +1 more | 2018-11-20 |