Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347679 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Matthew Spuller | 2025-07-01 |
| 12327763 | Treatment methods for titanium nitride films | Xinming Zhang, Shashank Sharma, Abhilash J. Mayur, Matthew Spuller | 2025-06-10 |
| 11978646 | Thermal chamber with improved thermal uniformity | Dongming Iu, Kartik Shah, Matthew Spuller, Jau-Jiun CHEN, Kong CHAN +4 more | 2024-05-07 |
| 11901195 | Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operation | Pradeep SAMPATH KUMAR, Dongming Iu, Shashank Sharma, Eric Rieske, Michael P. KAMP | 2024-02-13 |
| 11859277 | Catalyst enhanced molybdenum deposition and gap fill | Xi Cen, Kai Wu, Seshadri Ganguli, Xinming Zhang, Abhilash J. Mayur | 2024-01-02 |
| 11823901 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Matthew Spuller | 2023-11-21 |
| 11587789 | System and method for radical and thermal processing of substrates | Xinming Zhang, Abhilash J. Mayur, Shashank Sharma, Matthew Spuller, Zeqiong Zhao | 2023-02-21 |
| 11348769 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Matthew Spuller, Kong CHAN, Dongming Iu +1 more | 2022-05-31 |
| 10948353 | Thermal processing chamber with low temperature control | Lara Hawrylchak, Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu +2 more | 2021-03-16 |
| 10770272 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Matthew Spuller, Kong CHAN, Dongming Iu | 2020-09-08 |
| 10571337 | Thermal cooling member with low temperature control | Lara Hawrylchak, Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu +2 more | 2020-02-25 |
| 10373859 | Support ring with masked edge | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2019-08-06 |
| 10128144 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Jeffrey Tobin, Jiping Li +1 more | 2018-11-13 |
| 10109514 | Visual feedback for process control in RTP chambers | Kim Vellore, Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Leonid M. Tertitski +2 more | 2018-10-23 |
| 10056286 | Support ring with masked edge | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2018-08-21 |
| 9842759 | Support ring with masked edge | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2017-12-12 |
| 9735034 | Visual feedback for process control in RTP chambers | Kim Vellore, Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Leonid M. Tertitski +2 more | 2017-08-15 |
| 9659809 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Jeffrey Tobin, Jiping Li +1 more | 2017-05-23 |
| 9552989 | Apparatus and method for improved control of heating and cooling of substrates | Blake Koelmel, Joseph M. Ranish | 2017-01-24 |
| 9514969 | Apparatus for reducing the effect of contamination on a rapid thermal process | Aaron Miller, Mehran Behdjat, Michael S. Liu | 2016-12-06 |
| 9385004 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Jeffrey Tobin, Jiping Li +1 more | 2016-07-05 |
| 9330955 | Support ring with masked edge | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2016-05-03 |
| 9117661 | Method of improving oxide growth rate of selective oxidation processes | Yoshitaka Yokota, Balasubramanian Ramachandran, Martin John Ripley | 2015-08-25 |
| 8888916 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca, Mehran Behdjat +3 more | 2014-11-18 |
| 8608853 | Thermal reactor with improved gas flow distribution | Ming-Kuei Tseng, Yoshitaka Yokota, Agus Sofian Tjandra, Robert Navasca, Mehran Behdjat +3 more | 2013-12-17 |