Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049881 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Bernard L. Hwang, Jeffrey Tobin +2 more | 2018-08-14 |
| 9031685 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung +1 more | 2015-05-12 |
| 8626330 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung +1 more | 2014-01-07 |
| 8027746 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung +1 more | 2011-09-27 |
| 7860597 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung +1 more | 2010-12-28 |
| 7745333 | Methods for depositing tungsten layers employing atomic layer deposition techniques | Ravi Rajagopalan, Amit Khandelwal, Madhu Moorthy, Srinivas Gandikota, Joseph Castro +9 more | 2010-06-29 |
| 7709385 | Method for depositing tungsten-containing layers by vapor deposition techniques | Ming Xi, Ashok Sinha, Moris Kori, Alfred Mak, Xinliang Lu +1 more | 2010-05-04 |
| 7695563 | Pulsed deposition process for tungsten nucleation | Xinliang Lu, Ping Jian, Jong Hyun Yoo, Alfred Mak, Robert Jackson +1 more | 2010-04-13 |
| 7660644 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung +1 more | 2010-02-09 |
| 7605083 | Formation of composite tungsten films | Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos, Mei Chang +7 more | 2009-10-20 |
| 7465665 | Method for depositing tungsten-containing layers by vapor deposition techniques | Ming Xi, Ashok Sinha, Moris Kori, Alfred Mak, Xinliang Lu +1 more | 2008-12-16 |
| 7405158 | Methods for depositing tungsten layers employing atomic layer deposition techniques | Ravi Rajagopalan, Amit Khandelwal, Madhu Moorthy, Srinivas Gandikota, Joseph Castro +9 more | 2008-07-29 |
| 7384867 | Formation of composite tungsten films | Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos, Mei Chang +7 more | 2008-06-10 |
| 7220673 | Method for depositing tungsten-containing layers by vapor deposition techniques | Ming Xi, Ashok Sinha, Moris Kori, Alfred Mak, Xinliang Lu +1 more | 2007-05-22 |
| 7211144 | Pulsed nucleation deposition of tungsten layers | Xinliang Lu, Ping Jian, Jong Hyun Yoo, Alfred Mak, Robert Jackson +1 more | 2007-05-01 |
| 7101795 | Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer | Ming Xi, Ashok Sinha, Moris Kori, Alfred Mak, Xinliang Lu +1 more | 2006-09-05 |
| 7085616 | Atomic layer deposition apparatus | Barry Chin, Alfred Mak, Lawrence Chung-Lai Lei, Ming Xi, Hua Chung +1 more | 2006-08-01 |
| 6939804 | Formation of composite tungsten films | Jeong Soo Byun, Frederick Wu, Ramanujapuran A. Srinivas, Avgerinos V. Gelatos, Mei Chang +7 more | 2005-09-06 |
| 6797340 | Method for depositing refractory metal layers employing sequential deposition techniques | Hongbin Fang, Hyung-Suk Yoon, Chi C. Young, James Horng, Ming Xi +2 more | 2004-09-28 |
| 6461435 | Showerhead with reduced contact area | Karl A. Littau, Bevan Vo, Salvador P. Umotoy, Son Trinh, Chien-Teh Kao +4 more | 2002-10-08 |
| 6328808 | Apparatus and method for aligning and controlling edge deposition on a substrate | Kenneth Tsai, Joseph Yudovsky, Steve Ghanayem, Patricia M. Liu, Toshiyuki Nakagawa +1 more | 2001-12-11 |
| 6210483 | Anti-notch thinning heater | Ken Tsai, Steve Ghanayem, Joseph Yudovsky | 2001-04-03 |
| 6186092 | Apparatus and method for aligning and controlling edge deposition on a substrate | Kenneth Tsai, Joseph Yudovsky, Steve Ghanayem, Patricia M. Liu, Toshiyuki Nakagawa +1 more | 2001-02-13 |