Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379669 | Massive overlay metrology sampling with multiple measurement columns | Andrei V. Shchegrov, Amnon Manassen, Andrew V. Hill, Yossi Simon, Gilad Laredo +1 more | 2025-08-05 |
| 11899375 | Massive overlay metrology sampling with multiple measurement columns | Andrei V. Shchegrov, Amnon Manassen, Andrew V. Hill, Yossi Simon, Gilad Laredo +1 more | 2024-02-13 |
| 11880142 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Dimitry Sanko, Liran Yerushalmi +2 more | 2024-01-23 |
| 11604063 | Self-calibrated overlay metrology using a skew training sample | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Dimitry Sanko, Liran Yerushalmi +2 more | 2023-03-14 |
| 11604420 | Self-calibrating overlay metrology | Stilian Ivanov Pandev, Min-Yeong Moon, Andrei V. Shchegrov, Dimitry Sanko, Liran Yerushalmi +2 more | 2023-03-14 |
| 11562289 | Loosely-coupled inspection and metrology system for high-volume production process monitoring | Song Wu, Yin Xu, Andrei V. Shchegrov, Lie-Quan Lee, Pablo I. Rovira | 2023-01-24 |
| 10804167 | Methods and systems for co-located metrology | David Y. Wang, Esen Salcin, Michael Friedmann, Derrick Shaughnessy, Andrei V. Shchegrov +1 more | 2020-10-13 |
| 10352876 | Signal response metrology for scatterometry based overlay measurements | Andrei V. Shchegrov, Stilian Ivanov Pandev, Alexander Kuznetsov, Walter D. Mieher | 2019-07-16 |
| 10139352 | Measurement of small box size targets | Stilian Ivanov Pandev, Wei Lu, Andrei V. Shchegrov, Pablo I. Rovira | 2018-11-27 |
| 10101670 | Statistical model-based metrology | Stilian Ivanov Pandev | 2018-10-16 |
| 9875946 | On-device metrology | Andrei V. Shchegrov, Stilian Ivanov Pandev, Ady Levy, Daniel Kandel, Michael Adel +1 more | 2018-01-23 |
| 9693439 | High brightness liquid droplet X-ray source for semiconductor metrology | Guorong V. Zhuang, Michael S. Bakeman, Andrei V. Shchegrov | 2017-06-27 |
| 8879073 | Optical metrology using targets with field enhancement elements | Andrei V. Shchegrov, Michael S. Bakeman, Thaddeus Gerard Dziura, Alexander Kuznetsov, Bin-Ming Benjamin Tsai | 2014-11-04 |
| 8860937 | Metrology systems and methods for high aspect ratio and large lateral dimension structures | Thaddeus Gerard Dziura, Xuefeng Liu, David Y. Wang, Alexander Kuznetsov, Johannes D. de Veer +3 more | 2014-10-14 |
| 8825444 | Automated system check for metrology unit | Pablo I. Rovira, Jaime Poris, Scott Penner | 2014-09-02 |
| 7301623 | Transferring, buffering and measuring a substrate in a metrology system | Jiangtao Hu, Christopher W. Blaufus | 2007-11-27 |
| 6511921 | Methods for reducing the reactivity of a semiconductor substrate surface and for evaluating electrical properties of a semiconductor substrate | Christopher Alan Panczyk, Walter Huber | 2003-01-28 |