| D850909 |
Packaging container |
Mitsuko Ogaki, Hiroo Fujiwara, Hiroo Noguchi |
2019-06-11 |
| 9534724 |
Gas showerhead, method for making the same and thin film growth reactor |
Yong Jiang, Ning Zhou, Zhiyou Du |
2017-01-03 |
| D729069 |
Packaging box |
Mutsumi Ajichi |
2015-05-12 |
| D725479 |
Packaging container |
Mutsumi Ajichi |
2015-03-31 |
| 8336488 |
Multi-station plasma reactor with multiple plasma regions |
Aihua Chen, Yijun Liu, Jinyuan Chen, Lee Luo, Tuqiang Ni +1 more |
2012-12-25 |
| 7658800 |
Gas distribution assembly for use in a semiconductor work piece processing reactor |
Aihua Chen, Shulin Wang, Gerald Yin, Qing Lv, Li Fu |
2010-02-09 |
| D605542 |
Bell push device |
— |
2009-12-08 |
| D600566 |
Sheet packaging |
Mutsumi Ajichi |
2009-09-22 |
| 7520939 |
Integrated bevel clean chamber |
Lily Pang, Anh N. Nguyen, Alexander Lerner |
2009-04-21 |
| 7223323 |
Multi-chemistry plating system |
Michael Yang, Ming Xi, Russell C. Ellwanger, Eric Bramwell Britcher, Bernardo Donoso +11 more |
2007-05-29 |
| 6802906 |
Emissivity-change-free pumping plate kit in a single wafer chamber |
Xiaoliang Jin, Shulin Wang, Lee Luo, Steven Chen |
2004-10-12 |
| 6652655 |
Method to isolate multi zone heater from atmosphere |
— |
2003-11-25 |
| 6645884 |
Method of forming a silicon nitride layer on a substrate |
Michael Yang, Chien-Teh Kao, Karl A. Littau, Steven Chen, Ying Yu |
2003-11-11 |
| 6646235 |
Multi-zone resistive heater |
Steven Chen, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang |
2003-11-11 |
| 6617553 |
Multi-zone resistive heater |
Anqing Cui, Xiaoxiong Yuan |
2003-09-09 |
| 6586343 |
Method and apparatus for directing constituents through a processing chamber |
Ying Yu, Steven Chen |
2003-07-01 |
| 6582522 |
Emissivity-change-free pumping plate kit in a single wafer chamber |
Lee Luo, Shulin Wang, Binh Tran, Alexander Tam, Errol Antonio C. Sanchez +2 more |
2003-06-24 |
| 6530992 |
Method of forming a film in a chamber and positioning a substitute in a chamber |
Michael Yang, Steven Chen |
2003-03-11 |
| 6500266 |
Heater temperature uniformity qualification tool |
Alexander M. Rubinchik, Aihua Chen, Abril Cabreros, Steven T. Li, Mark Yam +1 more |
2002-12-31 |
| 6423949 |
Multi-zone resistive heater |
Steven Chen, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang |
2002-07-23 |
| 6156079 |
Window support member for a semiconductor processing system |
Yu-Feng Chang, Kuo-Chun Wu, Steven Chen |
2000-12-05 |
| 6143084 |
Apparatus and method for generating plasma |
Steven T. Li, Andrew Ruspini, Yu-Chia Chang, Aihua Chen, Binh Bui |
2000-11-07 |
| 6116186 |
Apparatus for cooling a plasma generator |
Steven T. Li, Andrew Ruspini |
2000-09-12 |
| 6110284 |
Apparatus and a method for shielding light emanating from a light source heating a semicondutor processing chamber |
Chen-An Chen, Steven Chen |
2000-08-29 |
| 6066836 |
High temperature resistive heater for a process chamber |
Steven Chen, Mei Chang, Ming Xi, Chen-An Chen, Chiliang Chen |
2000-05-23 |
