Issued Patents All Time
Showing 51–75 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6937408 | Rotation recording apparatus and method of inspection thereof | Ryoheita Hattori, Naoyuki Kagami, Tetesuya Kokubo, Nobuya Matsubara | 2005-08-30 |
| 6927391 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2005-08-09 |
| 6828566 | Method and apparatus for specimen fabrication | Satoshi Tomimatsu, Yuichi Madokoro, Yoshimi Kawanami, Yasunori Doi | 2004-12-07 |
| 6797954 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe +4 more | 2004-09-28 |
| 6794663 | Method and apparatus for specimen fabrication | Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Eiichi Seya, Mitsuo Tokuda +3 more | 2004-09-21 |
| 6781125 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2004-08-24 |
| 6750451 | Observation apparatus and observation method using an electron beam | Masanari Koguchi, Kuniyasu Nakamura, Yoshifumi Taniguchi, Mikio Ichihashi | 2004-06-15 |
| 6734687 | Apparatus for detecting defect in device and method of detecting defect | Tohru Ishitani, Hidemi Koike, Aritoshi Sugimoto, Isamu Sekihara, Satoshi Tomimatsu +1 more | 2004-05-11 |
| 6717156 | Beam as well as method and equipment for specimen fabrication | Masakazu Sugaya, Hiroyasu Shichi, Muneyuki Fukuda, Hidemi Koike | 2004-04-06 |
| 6664552 | Method and apparatus for specimen fabrication | Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Eiichi Seya, Mitsuo Tokuda +3 more | 2003-12-16 |
| 6650491 | System and method for setting a read/write offset and for recovering from data read errors | Hiroaki Suzuki, Akira Shibata, Tatsuya Endoh, Takao Matsui, Masaomi Ikeda +1 more | 2003-11-18 |
| 6583426 | Projection ion beam machining apparatus | Yoshimi Kawanami, Yuuichi Madokoro, Satoshi Tomimatsu | 2003-06-24 |
| 6538254 | Method and apparatus for sample fabrication | Satoshi Tomimatsu, Yuichi Madokoro, Yoshimi Kawanami, Yasunori Doi | 2003-03-25 |
| 6476390 | Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams | Hisaya Murakoshi, Yusuke Yajima, Hiroyuki Shinada, Mari Nozoe, Atsuko Takafuji +2 more | 2002-11-05 |
| 6384411 | Ion source and mass spectrometer instrument using the same | Atsumu Hirabayashi, Minoru Sakairi, Yasuaki Takada, Hideaki Koizumi | 2002-05-07 |
| 6147347 | Ion source and mass spectrometer instrument using the same | Atsumu Hirabayashi, Minoru Sakairi, Yasuaki Takada, Hideaki Koizumi | 2000-11-14 |
| 5910871 | Magnetic head having track width specified by grooves formed with projection ion beam | Yoshimi Kawanami, Hisashi Takano, Yuichi Madokoro, Satoshi Tomimatsu | 1999-06-08 |
| 5825035 | Processing method and apparatus using focused ion beam generating means | Michinobu Mizumura, Yuuichi Hamamura, Junzou Azuma, Akira Shimase, Takashi Kamimura +3 more | 1998-10-20 |
| 5583344 | Process method and apparatus using focused ion beam generating means | Michinobu Mizumura, Yuuichi Hamamura, Junzou Azuma, Akira Shimase, Takashi Kamimura +3 more | 1996-12-10 |
| 5504340 | Process method and apparatus using focused ion beam generating means | Michinobu Mizumura, Yuuichi Hamamura, Junzou Azuma, Akira Shimase, Takashi Kamimura +3 more | 1996-04-02 |
| 5399865 | Liquid metal ion source with high temperature cleaning apparatus for cleaning the emitter and reservoir | Tohru Ishitani | 1995-03-21 |
| 5148027 | Method of microarea analysis with a focused cesium ion beam | Hiroyasu Schichi, Tohru Ishitani | 1992-09-15 |
| 5120925 | Methods for device transplantation | Tsuyoshi Ohnishi, Yoshimi Kawanami, Yuuichi Madokoro, Tohru Ishitani | 1992-06-09 |
| 4841143 | Charged particle beam apparatus | Hifumi Tamura, Hiroyasu Shichi | 1989-06-20 |
| 4774414 | Liquid metal ion source | Tohru Ishitani, Toshiyuki Aida, Hifumi Tamura | 1988-09-27 |