Issued Patents All Time
Showing 76–81 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4755685 | Ion micro beam apparatus | Yoshimi Kawanami, Tohru Ishitani, Hifumi Tamura | 1988-07-05 |
| 4740698 | Hybrid charged particle apparatus | Hifumi Tamura, Norio Saitou | 1988-04-26 |
| 4733134 | Liquid metal ion source with pulse generator control | Hifumi Tamura, Tohru Ishitani, Yoshimi Kawanami | 1988-03-22 |
| 4697086 | Apparatus for implanting ion microbeam | Tohru Ishitani, Hifumi Tamura | 1987-09-29 |
| 4631448 | Ion source | Hifumi Tamura, Clay Shepherd, Toru Ishitani | 1986-12-23 |
| 4624833 | Liquid metal ion source and apparatus | Tohru Ishitani, Toshiyuki Aida, Hifumi Tamura | 1986-11-25 |