Issued Patents All Time
Showing 26–50 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9697987 | Charged particle beam device | Toshiyuki Yokosuka, Chahn Lee, Hajime Kawano, Shahedul Hoque, Kumiko Shimizu +1 more | 2017-07-04 |
| 9659744 | Charged particle beam apparatus and inspection method using the same | Natsuki Tsuno, Naomasa Suzuki, Shoji Hotta, Yoshinobu Kimura | 2017-05-23 |
| 9653256 | Charged particle-beam device | Akira Ikegami, Hideto Dohi, Yoichi Ose, Naomasa Suzuki, Momoyo Enyama +2 more | 2017-05-16 |
| 9640366 | Electron beam irradiation method and scanning electron microscope | Toshiyuki Yokosuka, Minoru Yamazaki, Kazutami Tago | 2017-05-02 |
| 9627171 | Charged particle beam device | Hiroshi Makino, Minoru Yamazaki, Yuzuru Mizuhara, Miki Isawa | 2017-04-18 |
| 9520266 | Pattern critical dimension measurement equipment and method for measuring pattern critical dimension | Kaori Shirahata, Yasunari Sohda, Makoto Sakakibara, Daisuke Bizen, Hajime Kawano | 2016-12-13 |
| 9521372 | Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded | Yoshinori Momonoi, Koichi Hamada, Yuji Takagi, Michio Hatano | 2016-12-13 |
| 9502212 | Charged particle beam apparatus | Yuzuru Mizuhara, Miki Isawa, Minoru Yamazaki, Hitoshi Tamura | 2016-11-22 |
| 9484181 | Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus | Hideto Dohi, Akira Ikegami | 2016-11-01 |
| 9472376 | Scanning electron microscope | Toshiyuki Yokosuka, Chahn Lee, Hiroshi Makino, Yuzuru Mizuhara, Miki Isawa +2 more | 2016-10-18 |
| 9336984 | Charged particle beam device and measuring method using the same | Daisuke Bizen, Hajime Kawano | 2016-05-10 |
| 9236220 | Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope | Natsuki Tsuno, Takafumi Miwa, Yoshinobu Kimura, Hajime Kawano | 2016-01-12 |
| 9159529 | Scanning electron microscope | Minoru Yamazaki, Yuko Sasaki, Makoto Suzuki | 2015-10-13 |
| 9019362 | Charged particle beam device and a method of improving image quality of the same | Jie Bai, Kenji Nakahira, Atsushi Miyamoto, Chie Shishido | 2015-04-28 |
| 8907279 | Electron microscope and image capturing method using electron beam | Natsuki Tsuno, Yuzuru Mochizuki, Takafumi Miwa, Yoshinobu Kimura, Toshiyuki Yokosuka | 2014-12-09 |
| 8766182 | Method for detecting information of an electric potential on a sample and charged particle beam apparatus | Minoru Yamazaki, Akira Ikegami, Osamu Nasu | 2014-07-01 |
| 8729491 | Charged particle beam apparatus | Hideto Dohi, Akira Ikegami | 2014-05-20 |
| 8648300 | Charged particle beam apparatus | Miki Isawa, Minoru Yamazaki, Yuzuru Mizuhara, Hiroshi Makino | 2014-02-11 |
| 8487250 | Method for detecting information of an electronic potential on a sample and charged particle beam apparatus | Minoru Yamazaki, Akira Ikegami, Osamu Nasu | 2013-07-16 |
| 8487253 | Scanning electron microscope | Minoru Yamazaki, Akira Ikegami, Manabu Yano, Kazunari Asao, Takeshi Mizuno +1 more | 2013-07-16 |
| 8481935 | Scanning electron microscope | Akira Ikegami, Minoru Yamazaki, Koichiro Takeuchi, Hisaya Murakoshi | 2013-07-09 |
| 8309923 | Sample observing method and scanning electron microscope | Seiko Omori, Zhaohui Cheng | 2012-11-13 |
| 8274048 | Scanning electron microscope having time constant measurement capability | Akira Ikegami, Koichiro Takeuchi, Atsushi Kobaru, Seiko Oomori | 2012-09-25 |
| 8263934 | Method for detecting information of an electric potential on a sample and charged particle beam apparatus | Minoru Yamazaki, Akira Ikegami, Osamu Nasu | 2012-09-11 |
| 8216420 | Plasma processing apparatus | Akihiro Sano, Akitaka Makino, Hitoshi Tamura, Masamichi Sakaguchi | 2012-07-10 |