Issued Patents All Time
Showing 51–74 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8153966 | Electrode unit and charged particle beam device | Noriaki Arai | 2012-04-10 |
| 8080790 | Scanning electron microscope | Minoru Yamazaki, Akira Ikegami, Manabu Yano, Kazunari Asao, Takeshi Mizuno +1 more | 2011-12-20 |
| 7989768 | Scanning electron microscope | Akira Ikegami, Minoru Yamazaki, Koichiro Takeuchi, Hisaya Murakoshi | 2011-08-02 |
| 7763852 | Scanning electron microscope having time constant measurement capability | Akira Ikegami, Koichiro Takeuchi, Atsushi Kobaru, Seiko Oomori | 2010-07-27 |
| 7442651 | Plasma etching method | Masahito Mori, Toshiaki Nishida, Naoshi Itabashi, Motohiko Yoshigai, Kazutami Tago | 2008-10-28 |
| RE39895 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Ken Yoshioka | 2007-10-23 |
| 7049243 | Surface processing method of a specimen and surface processing apparatus of the specimen | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2006-05-23 |
| 6919274 | LSI device etching method and apparatus thereof | Tsuyoshi Yoshida, Eiji Ikegami, Kouichi Nakaune, Masamichi Sakaguchi, Yasuyuki Miyamoto +1 more | 2005-07-19 |
| 6846363 | Plasma processing apparatus and method | Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2005-01-25 |
| 6833051 | Plasma processing apparatus and method | Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2004-12-21 |
| 6793768 | Plasma-assisted processing apparatus | Manabu Edamura, Kazuyuki Ikenaga, Atsushi Ootake | 2004-09-21 |
| 6755935 | Plasma processing apparatus | Ichiro Sasaki, Kenji Maeda, Tsutomu Tetsuka, Hironobu Kawahara | 2004-06-29 |
| 6756737 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Saburou Kanai, Tsutomu Tetsuka +3 more | 2004-06-29 |
| 6677244 | Specimen surface processing method | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2004-01-13 |
| 6499424 | Plasma processing apparatus and method | Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2002-12-31 |
| 6492277 | Specimen surface processing method and apparatus | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2002-12-10 |
| 6481370 | Plasma processsing apparatus | Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2002-11-19 |
| 6388624 | Parallel-planar plasma processing apparatus | Hironobu Kawahara | 2002-05-14 |
| 6388382 | Plasma processing apparatus and method | Akira Doi, Ken Yoshioka, Manabu Edamura, Saburou Kanai, Tsutomu Tetsuka +3 more | 2002-05-14 |
| 6309980 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Ken Yoshioka | 2001-10-30 |
| 6180019 | Plasma processing apparatus and method | Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Ken Yoshioka, Tsunehiko Tsubone +4 more | 2001-01-30 |
| 6074958 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Ken Yoshioka | 2000-06-13 |
| 5962347 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Ken Yoshioka | 1999-10-05 |
| 5874013 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Ken Yoshioka | 1999-02-23 |