Issued Patents All Time
Showing 51–73 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7518110 | Pattern measuring method and pattern measuring device | Takumichi Sutani, Ryoichi Matsuoka, Hitoshi Komuro, Akiyuki Sugiyama | 2009-04-14 |
| 7459712 | Method and apparatus of measuring pattern dimension and controlling semiconductor device process having an error revising unit | Maki Tanaka, Chie Shishido, Yuji Takagi | 2008-12-02 |
| 7439505 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Tatsuya Maeda, Juntaro Arima +1 more | 2008-10-21 |
| 7381951 | Charged particle beam adjustment method and apparatus | Takashi Doi, Noriaki Arai, Katsumi Setoguchi, Fumihiro Sasajima, Maki Tanaka +1 more | 2008-06-03 |
| 7365325 | Method and apparatus for observing a specimen | Atsushi Miyamoto, Maki Tanaka | 2008-04-29 |
| 7365322 | Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern | Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Takumichi Sutani | 2008-04-29 |
| 7230239 | Apparatus for inspecting three dimensional shape of a specimen and method of watching an etching process using the same | Maki Tanaka, Chie Shishido, Yuji Takagi | 2007-06-12 |
| 7230243 | Method and apparatus for measuring three-dimensional shape of specimen by using SEM | Maki Tanaka, Atsushi Miyamoto, Chie Shishido, Mitsuji Ikeda, Yasutaka Toyoda | 2007-06-12 |
| 7217925 | Scanning electron microscope | Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya | 2007-05-15 |
| 7187345 | Image forming method and charged particle beam apparatus | Atsushi Kobaru, Hiroki Kawada, Sho Takami, Katsuhiro Sasada, Kouichi Yamamoto +2 more | 2007-03-06 |
| 7173268 | Method of measuring pattern dimension and method of controlling semiconductor device process | Maki Tanaka, Chie Shishido, Yuji Takagi | 2007-02-06 |
| 7164128 | Method and apparatus for observing a specimen | Atsushi Miyamoto, Maki Tanaka | 2007-01-16 |
| 7009178 | Scanning electron microscope | Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya | 2006-03-07 |
| 7002151 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Tatsuya Maeda, Juntaro Arima +1 more | 2006-02-21 |
| 6929892 | Method of monitoring an exposure process | Chie Shishido, Yuki Ojima, Maki Tanaka, Wataru Nagatomo | 2005-08-16 |
| 6913861 | Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device | Chie Shishido, Osamu Komuro, Ryo Nakagaki, Maki Tanaka, Yuuji Takagi | 2005-07-05 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Chie Shishido, Yuji Takagi, Masahiro Watanabe, Yasuhiro Yoshitake, Shunichi Matsumoto +3 more | 2005-06-21 |
| 6897445 | Scanning electron microscope | Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya | 2005-05-24 |
| 6803573 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Tatsuya Maeda, Juntaro Arima +1 more | 2004-10-12 |
| 6791082 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Osamu Komuro, Chie Shishido | 2004-09-14 |
| 6791096 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Osamu Komuro, Chie Shishido | 2004-09-14 |
| 6713761 | Scanning electron microscope | Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya | 2004-03-30 |
| 6627888 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Tatsuya Maeda, Juntaro Arima +1 more | 2003-09-30 |