Issued Patents All Time
Showing 26–50 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8356260 | Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device | Wataru Nagatomo, Atsushi Miyamoto | 2013-01-15 |
| 8338804 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Akiyuki Sugiyama, Ryoichi Matsuoka, Takumichi Sutani, Yasutaka Toyoda | 2012-12-25 |
| 8319194 | Drug detection equipment | Makoto Hashimoto, Takefumi Yokokura, Masuyoshi Yamada, Hiroyuki Inoue | 2012-11-27 |
| 8244042 | Pattern matching method and computer program for executing pattern matching | Akiyuki Sugiyama, Hiroyuki Shindo, Hitoshi Komuro, Takumichi Sutani | 2012-08-14 |
| 8203504 | Image forming method and charged particle beam apparatus | Atsushi Kobaru, Hiroki Kawada, Sho Takami, Katsuhiro Sasada, Kouichi Yamamoto +2 more | 2012-06-19 |
| 8173962 | Pattern displacement measuring method and pattern measuring device | Takumichi Sutani, Ryoichi Matsuoka, Akiyuki Sugiyama, Hiroyuki Shindo | 2012-05-08 |
| 8158938 | Scanning electron microscope and a method for imaging a specimen using the same | Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka | 2012-04-17 |
| 8095896 | Method and system of displaying an exposure condition | Hirohito Koike, Chie Shishido | 2012-01-10 |
| 8073242 | SEM system and a method for producing a recipe | Atsushi Miyamoto, Tomofumi Nishiura, Ryoichi Matsuoka | 2011-12-06 |
| 8019161 | Method, device and computer program of length measurement | Takumichi Sutani, Ryoichi Matsuoka, Hitoshi Komuro, Akiyuki Sugiyama | 2011-09-13 |
| 7935927 | Method and apparatus for observing a specimen | Atsushi Miyamoto, Maki Tanaka | 2011-05-03 |
| 7925095 | Pattern matching method and computer program for executing pattern matching | Akiyuki Sugiyama, Hiroyuki Shindo, Hitoshi Komuro, Takumichi Sutani | 2011-04-12 |
| 7923703 | Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus | Akiyuki Sugiyama, Ryoichi Matsuoka, Takumichi Sutani, Yasutaka Toyoda | 2011-04-12 |
| 7889909 | Pattern matching method and pattern matching program | Hiroyuki Shindo, Akiyuki Sugiyama, Takumichi Sutani, Hitoshi Komuro | 2011-02-15 |
| 7889908 | Method and apparatus for measuring shape of a specimen | Atsushi Miyamoto, Maki Tanaka | 2011-02-15 |
| 7817105 | Image forming method and charged particle beam apparatus | Atsushi Kobaru, Hiroki Kawada, Sho Takami, Katsuhiro Sasada, Kouichi Yamamoto +2 more | 2010-10-19 |
| 7816062 | Method and apparatus for semiconductor device production process monitoring and method and apparatus for estimating cross sectional shape of a pattern | Wataru Nagatomo, Atsushi Miyamoto, Hideaki Sasazawa | 2010-10-19 |
| 7772554 | Charged particle system | Akiyuki Sugiyama, Yutaka Hojo, Yukio Yoshizawa | 2010-08-10 |
| 7732792 | Pattern measurement apparatus | Ryoichi Matsuoka, Akihiro Onizawa, Akiyuki Sugiyama, Yasutaka Toyoda | 2010-06-08 |
| 7705300 | Charged particle beam adjusting method and charged particle beam apparatus | Noriaki Arai, Takashi Doi, Fumihiro Sasajima, Yoshihiro Kimura | 2010-04-27 |
| 7685560 | Method and apparatus for monitoring exposure process | Wataru Nagatomo, Chie Shishido | 2010-03-23 |
| 7679055 | Pattern displacement measuring method and pattern measuring device | Takumichi Sutani, Ryoichi Matsuoka, Akiyuki Sugiyama, Hiroyuki Shindo | 2010-03-16 |
| 7681159 | System and method for detecting defects in a semiconductor during manufacturing thereof | Ryoichi Matsuoka, Takumichi Sutani | 2010-03-16 |
| 7559047 | Method and apparatus for creating imaging recipe | Atsushi Miyamoto, Wataru Nagatomo, Ryoichi Matsuoka, Takumichi Sutani | 2009-07-07 |
| 7521695 | Scanning electron microscope | Yoshinori Nakada, Shunsuke Koshihara, Ryulchirou Tamochi, Yayol Hosoya | 2009-04-21 |