Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9372411 | Projection objective of a microlithographic projection exposure apparatus | Johannes Zellner, Boris Bittner, Martin von Hodenberg, Sonja Schneider, Ricarda Schoemer +4 more | 2016-06-21 |
| 9348234 | Microlithographic apparatus | Boris Bittner, Sonja Schneider, Ricarda Schoemer, Martin von Hodenberg, Hendrik Wagner +1 more | 2016-05-24 |
| 9316922 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer | 2016-04-19 |
| 9280058 | Projection objective for a microlithographic projection exposure apparatus | Robert Eder | 2016-03-08 |
| 9235143 | Microlithographic projection exposure apparatus | Boris Bittner | 2016-01-12 |
| 9170497 | Projection exposure apparatus with at least one manipulator | Boris Bittner, Martin von Hodenberg | 2015-10-27 |
| 9164396 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2015-10-20 |
| 9134613 | Illumination and displacement device for a projection exposure apparatus | Sonja Schneider, Martin von Hodenberg, Boris Bittner, Ricarda Schneider | 2015-09-15 |
| 8902407 | Projection objective for a microlithographic projection exposure apparatus | Robert Eder | 2014-12-02 |
| 8879159 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer | 2014-11-04 |
| 8659744 | Method for correcting a lithography projection objective, and such a projection objective | Wilhelm Ulrich, Thomas Okon, Toralf Gruner, Boris Bittner, Volker Graeschus | 2014-02-25 |
| 8330935 | Exposure apparatus and measuring device for a projection lens | Albrecht Ehrmann, Ulrich Wegmann, Rainer Hoch, Joerg Mallmann, Karl-Heinz Schuster +6 more | 2012-12-11 |
| 8319944 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2012-11-27 |
| 8174676 | Method for correcting a lithography projection objective, and such a projection objective | Wilhelm Ulrich, Thomas Okon, Toralf Gruner, Boris Bittner, Volker Graeschus | 2012-05-08 |
| 8064041 | Projection objective for a microlithographic projection exposure apparatus | Robert Eder | 2011-11-22 |
| 8054557 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer | 2011-11-08 |
| 7782440 | Projection lens system of a microlithographic projection exposure installation | Helmut Beierl, Sascha Bleidistel, Wolfgang Singer, Toralf Gruner, Alexander Epple +6 more | 2010-08-24 |
| 7719658 | Imaging system for a microlithographical projection light system | Andreas Dorsel, Toralf Gruner, Bernhard Kneer, Susanne Beder, Alexander Epple | 2010-05-18 |
| 7692868 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer | 2010-04-06 |
| 7463423 | Lithography projection objective, and a method for correcting image defects of the same | Ulrich Loering, Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer | 2008-12-09 |