Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9977338 | Projection objective for a microlithographic projection exposure apparatus | Norbert Wabra | 2018-05-22 |
| 9588445 | Projection objective for a microlithographic projection exposure apparatus | Norbert Wabra | 2017-03-07 |
| 9280058 | Projection objective for a microlithographic projection exposure apparatus | Norbert Wabra | 2016-03-08 |
| 8902407 | Projection objective for a microlithographic projection exposure apparatus | Norbert Wabra | 2014-12-02 |
| 8064041 | Projection objective for a microlithographic projection exposure apparatus | Norbert Wabra | 2011-11-22 |
| 4892982 | Timing mechanism with improved clutch assembly | William J. Hueber, R. Keith Cearlock | 1990-01-09 |
| 4796484 | Shaft detent assembly for a timing mechanism | — | 1989-01-10 |
| 4611103 | Means providing intermittent motion to a cam means of a timing mechanism and having sub-interval switching means | Donald L. Ray | 1986-09-09 |