Issued Patents All Time
Showing 51–75 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8246211 | Filter device for the compensation of an asymmetric pupil illumination | Manfred Maul | 2012-08-21 |
| 8237918 | Optical system of a microlithographic projection exposure apparatus | Michael Totzeck, Toralf Gruner | 2012-08-07 |
| 8098366 | Optical system, in particular of a microlithographic projection exposure apparatus | Ingo Saenger | 2012-01-17 |
| 8081293 | Illumination system of a microlithographic projection exposure apparatus | Nils Dieckmann | 2011-12-20 |
| 8077289 | Device and method for influencing the polarization distribution in an optical system | — | 2011-12-13 |
| 8068279 | Optical system of an illumination device of a projection exposure apparatus | Karl-Heinz Schuster, Juergen Hartmaier, Manfred Maul, Dieter Schmerek, Detlev Mueller +3 more | 2011-11-29 |
| 8040492 | Illumination system of a microlithographic projection exposure apparatus | — | 2011-10-18 |
| 8035803 | Subsystem of an illumination system of a microlithographic projection exposure apparatus | — | 2011-10-11 |
| 8031327 | Illumination system of a microlithographic projection exposure apparatus | — | 2011-10-04 |
| 8025427 | Filter device for the compensation of an asymmetric pupil illumination | Manfred Maul | 2011-09-27 |
| 8004656 | Illumination system for a microlithographic projection exposure apparatus | Manfred Maul, Vladimir Davydenko, Axel Scholz, Markus Deguenther, Johannes Wangler | 2011-08-23 |
| 7995280 | Projection exposure system, beam delivery system and method of generating a beam of light | Matthias Kuss, Gerd Reisinger, Manfred Maul, Vladimir Davydenko | 2011-08-09 |
| 7940375 | Transmission filter apparatus | Axel Scholz | 2011-05-10 |
| 7929116 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Wilhelmus Petrus De Boeij, Tilmann Heil, Roel De Jonge | 2011-04-19 |
| 7916391 | Apparatus for providing a pattern of polarization | Michael Albert | 2011-03-29 |
| 7847921 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack +4 more | 2010-12-07 |
| 7847920 | Illumination system and polarizer for a microlithographic projection exposure apparatus | Axel Scholz, Manfred Maul | 2010-12-07 |
| 7817250 | Microlithographic projection exposure apparatus | Michael Totzeck, Alexandra Pazidis, Michael Ricker | 2010-10-19 |
| 7798676 | Filter device for the compensation of an asymmetric pupil illumination | Manfred Maul | 2010-09-21 |
| 7787104 | Illumination optics for a microlithographic projection exposure apparatus | — | 2010-08-31 |
| 7782443 | Illumination system of a microlithographic projection exposure apparatus | Ralf Mueller, Andras G. Major | 2010-08-24 |
| 7714983 | Illumination system for a microlithography projection exposure installation | Jess Koehler, Johannes Wangler, Markus Brotsack, Wolfgang Singer, Manfred Maul | 2010-05-11 |
| 7663735 | Microlithographic projection exposure apparatus with immersion projection lens | — | 2010-02-16 |
| 7593095 | System for reducing the coherence of laser radiation | Manfred Maul, Nils Dieckmann | 2009-09-22 |
| 7551261 | Illumination system for a microlithography projection exposure installation | — | 2009-06-23 |