Issued Patents All Time
Showing 76–81 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7511886 | Optical beam transformation system and illumination system comprising an optical beam transformation system | Joerg Schultz, Markus Deguenther, Markus Brotsack, Gerhard Fuerter, Wolfgang Singer +2 more | 2009-03-31 |
| 7408616 | Microlithographic exposure method as well as a projection exposure system for carrying out the method | Toralf Gruner, Daniel Kraehmer, Michael Totzeck, Johannes Wangler, Markus Brotsack +4 more | 2008-08-05 |
| 7408622 | Illumination system and polarizer for a microlithographic projection exposure apparatus | Axel Scholz, Manfred Maul | 2008-08-05 |
| 7405808 | Optical system, in particular illumination system, of a microlithographic projection exposure apparatus | Toralf Gruner, Michael Totzeck, Wilhelm Ulrich, Gerhard Fuerter | 2008-07-29 |
| 7345740 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Wilhelmus Petrus De Boeij, Roel De Jonge, Tilmann Heil | 2008-03-18 |
| 7312852 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Wilhelmus Petrus De Boeij, Tilmann Heil | 2007-12-25 |