Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8395753 | Microlithographic projection exposure apparatus | Damian Fiolka, Michael Totzeck, Alexandra Pazidis | 2013-03-12 |
| 7817250 | Microlithographic projection exposure apparatus | Damian Fiolka, Michael Totzeck, Alexandra Pazidis | 2010-10-19 |
| 7654055 | Glueless panel locking system | — | 2010-02-02 |