| 7633073 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2009-12-15 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christian Alexander Hoogendam +12 more |
2009-10-13 |
| 7593093 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2009-09-22 |
| 7593092 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2009-09-22 |
| 7532310 |
Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck |
Aschwin Lodewijk Hendricus Johannes Van Meer, Joost Jeroen Ottens, Edwin Augustinus Matheus Van Gompel |
2009-05-12 |
| 7528929 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2009-05-05 |
| 7486381 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Henrikus Herman Marie Cox, Christiaan Alexander Hoogendam, Koen Jacobus Johannes Maria Zaal, Minne Cuperus |
2009-02-03 |
| 7468779 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +3 more |
2008-12-23 |
| 7463330 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Catharinus Hubertus Mulkens |
2008-12-09 |
| 7459669 |
Sensor and lithographic apparatus |
Rob Adrianus Antonius Maria Bastiaensen, Marcel Maurice Hemerik, Marcus Adrianus Van De Kerkhof, Jacob Sonneveld |
2008-12-02 |
| 7453063 |
Calibration substrate and method for calibrating a lithographic apparatus |
Joost Jeroen Ottens, Frederick Eduard De Jong, Koen Goorman, Boris Menchtchikov |
2008-11-18 |
| 7433016 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2008-10-07 |
| 7411653 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2008-08-12 |
| 7379155 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net, Franciscus Johaannes Herman Maria Teunissen +4 more |
2008-05-27 |
| 7379159 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Johannes Catharinus Hubertus Mulkens +1 more |
2008-05-27 |
| 7375796 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogedam, Hans Jansen, Johannes Catharinus Hubertus Mulkens +1 more |
2008-05-20 |
| 7365827 |
Lithographic apparatus and device manufacturing method |
Pieter Renaat Maria Hennus, Patrick Johannes Cornelus Hendrik Smulders, Peter Smits |
2008-04-29 |
| 7352434 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen +12 more |
2008-04-01 |
| 7304715 |
Lithographic apparatus and device manufacturing method |
Theodorus Petrus Maria Cadee, Joost Jeroen Ottens, Frederick Eduard De Jong, Koen Goorman, Boris Menchtchikov +6 more |
2007-12-04 |
| 7248334 |
Sensor shield |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Johannes Catharinus Hubertus Mulkens +1 more |
2007-07-24 |
| 7227619 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal, Joost Jeroen Ottens |
2007-06-05 |
| 7224436 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more |
2007-05-29 |
| 7213963 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2007-05-08 |
| 7199858 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2007-04-03 |
| 7196768 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Frederik Eduard De Jong, Koen Goorman, Boris Menchtchikov, Edwin Augustinus Matheus Van Gompel |
2007-03-27 |