Issued Patents All Time
Showing 51–75 of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854444 | Sulfur-containing thin films | Fu Tang, Michael Eugene Givens, Jan Willem Maes, Qi Xie | 2020-12-01 |
| 10854460 | Deposition of organic films | Eva Tois, Hidemi Suemori, Viljami Pore, Varun Sharma | 2020-12-01 |
| 10851456 | Deposition of metal borides | Chiyu Zhu, Kiran Shrestha | 2020-12-01 |
| 10784105 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Ryu Nakano +1 more | 2020-09-22 |
| 10707082 | Methods for depositing thin films comprising indium nitride by atomic layer deposition | Viljami Pore, Antti Niskanen | 2020-07-07 |
| 10665425 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2020-05-26 |
| 10662534 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2020-05-26 |
| 10662533 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2020-05-26 |
| 10636889 | Titanium aluminum and tantalum aluminum thin films | Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen, Timo Asikainen +2 more | 2020-04-28 |
| 10612137 | Organic reactants for atomic layer deposition | Antti Niskanen, Eva Tois, Hidemi Suemori | 2020-04-07 |
| 10573511 | Methods for forming silicon nitride thin films | Antti Niskanen, Jaakko Anttila | 2020-02-25 |
| 10553424 | Sulfur-containing thin films | Fu Tang, Michael Eugene Givens, Jan Willem Maes, Qi Xie | 2020-02-04 |
| 10553440 | Methods for depositing nickel films and for making nickel silicide and nickel germanide | Viljami Pore, Tom E. Blomberg, Eva Tois | 2020-02-04 |
| 10510530 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Ryu Nakano +1 more | 2019-12-17 |
| 10456808 | Selective deposition of metals, metal oxides, and dielectrics | Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2019-10-29 |
| 10453701 | Deposition of organic films | Eva Tois, Hidemi Suemori, Viljami Pore, Varun Sharma, Jan Willem Maes +2 more | 2019-10-22 |
| 10443123 | Dual selective deposition | Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2019-10-15 |
| 10428421 | Selective deposition on metal or metallic surfaces relative to dielectric surfaces | Raija H. Matero, Elina Färm, Tom E. Blomberg | 2019-10-01 |
| 10395917 | Si precursors for deposition of SiN at low temperatures | Antti Niskanen, Shang Chen, Viljami Pore, Atsuki Fukazawa, Hideaki Fukuda | 2019-08-27 |
| 10373820 | Deposition of organic films | Eva Tois, Hidemi Suemori, Viljami Pore, Varun Sharma | 2019-08-06 |
| 10343920 | Aligned carbon nanotubes | — | 2019-07-09 |
| 10344378 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Jaakko Niinisto, Mikko Ritala, Markku Leskelä | 2019-07-09 |
| 10283319 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2019-05-07 |
| 10280519 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2019-05-07 |
| 10273584 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2019-04-30 |