Issued Patents All Time
Showing 101–125 of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514956 | Method of growing oxide thin films | Eva Tois, Marko Tuominen | 2016-12-06 |
| 9502289 | Selective formation of metallic films on metallic surfaces | Antti Niskanen, Marko Tuominen | 2016-11-22 |
| 9478419 | Sulfur-containing thin films | Fu Tang, Michael Eugene Givens, Jan Willem Maes, Qi Xie | 2016-10-25 |
| 9472757 | Method of making a resistive random access memory device | Qi Xie, Jan Willem Maes, Tom E. Blomberg, Marko Tuominen, Robin Roelofs +1 more | 2016-10-18 |
| 9379011 | Methods for depositing nickel films and for making nickel silicide and nickel germanide | Viljami Pore, Tom E. Blomberg, Eva Tois | 2016-06-28 |
| 9365926 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Jaakko Niinisto, Mikko Ritala, Markku Leskelä | 2016-06-14 |
| 9368352 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Ryu Nakano +1 more | 2016-06-14 |
| 9257303 | Selective formation of metallic films on metallic surfaces | Antti Niskanen, Marko Tuominen | 2016-02-09 |
| 9245742 | Sulfur-containing thin films | Fu Tang, Michael Eugene Givens, Jan Willem Maes, Qi Xie | 2016-01-26 |
| 9236247 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Eric James Shero +2 more | 2016-01-12 |
| 9228259 | Method for treatment of deposition reactor | Eric James Shero, Fred Alokozai, Dong Li, Jereld Lee Winkler, Xichong Chen | 2016-01-05 |
| 9217200 | Modification of nanoimprint lithography templates by atomic layer deposition | Kai-Erik Elers | 2015-12-22 |
| 9153441 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Ryu Nakano +1 more | 2015-10-06 |
| 9129897 | Metal silicide, metal germanide, methods for making the same | Viljami Pore, Tom E. Blomberg, Eva Tois | 2015-09-08 |
| 9112003 | Selective formation of metallic films on metallic surfaces | Antti Niskanen, Marko Tuominen | 2015-08-18 |
| 9111749 | Silane or borane treatment of metal thin films | Eric James Shero | 2015-08-18 |
| 8956971 | Selective formation of metallic films on metallic surfaces | Antti Niskanen, Marko Tuominen | 2015-02-17 |
| 8912101 | Method for forming Si-containing film using two precursors by ALD | Naoto Tsuji, Atsuki Fukazawa, Noboru Takamure, Antti Niskanen, Hyung Sang Park | 2014-12-16 |
| 8846502 | Methods for depositing thin films comprising gallium nitride by atomic layer deposition | Viljami Pore, Antti Niskanen | 2014-09-30 |
| 8846550 | Silane or borane treatment of metal thin films | Eric James Shero | 2014-09-30 |
| 8841182 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Eric James Shero +2 more | 2014-09-23 |
| 8679958 | Methods for forming doped silicon oxide thin films | Noboru Takamure, Atsuki Fukazawa, Hideaki Fukuda, Antti Niskanen, Ryu Nakano +1 more | 2014-03-25 |
| 8592294 | High temperature atomic layer deposition of dielectric oxides | Hannu Huotari, Marko Tuominen | 2013-11-26 |
| 8545936 | Methods for forming carbon nanotubes | Hannu Huotari | 2013-10-01 |
| 8536058 | Method of growing electrical conductors | Juhana Kostamo, Pekka Soininen, Kai-Erik Elers | 2013-09-17 |