Issued Patents All Time
Showing 151–173 of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887795 | Method of growing electrical conductors | Pekka Soininen, Kai-Erik Elers | 2005-05-03 |
| 6863727 | Method of depositing transition metal nitride thin films | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2005-03-08 |
| 6858524 | Method of depositing barrier layer for metal gates | Hannu Huotari | 2005-02-22 |
| 6852635 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen | 2005-02-08 |
| 6831315 | Conformal thin films over textured capacitor electrodes | Ivo Raaijmakers, Ernst H. A. Granneman | 2004-12-14 |
| 6806145 | Low temperature method of forming a gate stack with a high k layer deposited over an interfacial oxide layer | Eric James Shero, Christophe Pomarede, Jan Willem Hub Maes, Marko Tuominen | 2004-10-19 |
| 6800552 | Deposition of transition metal carbides | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2004-10-05 |
| 6794314 | Method of forming ultrathin oxide layer | Ivo Raaijmakers, Yong-Bae Kim, Marko Tuominen | 2004-09-21 |
| 6780704 | Conformal thin films over textured capacitor electrodes | Ivo Raaijmakers, Ernst H. A. Granneman | 2004-08-24 |
| 6759325 | Sealing porous structures | Ivo Raaijmakers, Pekka Soininen, Ernst H. A. Granneman, Kai-Erik Elers, Marko Tuominen +3 more | 2004-07-06 |
| 6727169 | Method of making conformal lining layers for damascene metallization | Ivo Raaijmakers, Ville Antero Saanila, Pekka Soininen, Kai-Erik Elers, Ernst H. A. Granneman | 2004-04-27 |
| 6703708 | Graded thin films | Christiaan J. Werkhoven, Ivo Raaijmakers | 2004-03-09 |
| 6699783 | Method for controlling conformality with alternating layer deposition | Ivo Raaijmakers, Pekka Soininen, Ernst H. A. Granneman | 2004-03-02 |
| 6686271 | Protective layers prior to alternating layer deposition | Ivo Raaijmakers, Pekka Soininen, Ernst H. A. Granneman | 2004-02-03 |
| 6664192 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen | 2003-12-16 |
| 6660660 | Methods for making a dielectric stack in an integrated circuit | Marko Tuominen | 2003-12-09 |
| 6534395 | Method of forming graded thin films using alternating pulses of vapor phase reactants | Christiaan J. Werkhoven, Ivo Raaijmakers | 2003-03-18 |
| 6500780 | Method for preparing heterogeneous catalysts of desired metal content | Tuomo Suntola, Arla Kytökivi, Eeva-Liisa Lakomaa, Marina Lindblad, Jukka Hietala +5 more | 2002-12-31 |
| 6492283 | Method of forming ultrathin oxide layer | Ivo Raaijmakers, Yong-Bae Kim, Marko Tuominen | 2002-12-10 |
| 6482262 | Deposition of transition metal carbides | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2002-11-19 |
| 6482733 | Protective layers prior to alternating layer deposition | Ivo Raaijmakers, Pekka Soininen, Ernst H. A. Granneman | 2002-11-19 |
| 6482740 | Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOH | Pekka Soininen, Kai-Erik Elers | 2002-11-19 |
| 6391785 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen | 2002-05-21 |