Issued Patents All Time
Showing 126–150 of 173 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8501637 | Silicon dioxide thin films by ALD | Raija H. Matero | 2013-08-06 |
| 8501275 | Enhanced deposition of noble metals | Marko Tuominen, Antti Rahtu | 2013-08-06 |
| 8252703 | Methods for forming roughened surfaces and applications thereof | Hannu Huotari | 2012-08-28 |
| 8025922 | Enhanced deposition of noble metals | Marko Tuominen, Antti Rahtu | 2011-09-27 |
| 8017182 | Method for depositing thin films by mixed pulsed CVD and ALD | Menso Hendriks, Martin Knapp | 2011-09-13 |
| 7981791 | Thin films | Ivo Raaijmakers, Wei Li, Juhana Kostamo, Hessel Sprey, Christiaan J. Werkhoven | 2011-07-19 |
| 7955979 | Method of growing electrical conductors | Juhana Kostamo, Pekka Soininen, Kai-Erik Elers | 2011-06-07 |
| 7923382 | Method for forming roughened surface | Hannu Huotari | 2011-04-12 |
| 7824492 | Method of growing oxide thin films | Eva Tois, Marko Tuominen | 2010-11-02 |
| 7771533 | Atomic-layer-chemical-vapor-deposition of films that contain silicon dioxide | Eva Tois, Marko Tuominen | 2010-08-10 |
| 7771534 | Method of growing oxide thin films | Eva Tois, Marko Tuominen | 2010-08-10 |
| 7749871 | Method for depositing nanolaminate thin films on sensitive surfaces | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2010-07-06 |
| 7704896 | Atomic layer deposition of thin films on germanium | Marko Tuominen, Antti Rahtu | 2010-04-27 |
| 7691757 | Deposition of complex nitride films | Tanja Claasen, Peter Zagwijn | 2010-04-06 |
| 7670944 | Conformal lining layers for damascene metallization | Ivo Raaijmakers, Ville Antero Saanila, Pekka Soininen, Kai-Erik Elers, Ernst H. A. Granneman | 2010-03-02 |
| 7563715 | Method of producing thin films | Hannu Huotari | 2009-07-21 |
| 7494927 | Method of growing electrical conductors | Juhana Kostamo, Pekka Soininen, Kai-Erik Elers | 2009-02-24 |
| 7491634 | Methods for forming roughened surfaces and applications thereof | Hannu Huotari | 2009-02-17 |
| 7419903 | Thin films | Ivo Raaijmakers, Wei Li, Juhana Kostamo, Hessel Sprey | 2008-09-02 |
| 7329590 | Method for depositing nanolaminate thin films on sensitive surfaces | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2008-02-12 |
| 7102235 | Conformal lining layers for damascene metallization | Ivo Raaijmakers, Yille A. Saanila, Pekka Soininen, Kai-Erik Elers, Ernst H. A. Granneman | 2006-09-05 |
| 7045406 | Method of forming an electrode with adjusted work function | Hannu Huotari, Marko Tuominen | 2006-05-16 |
| 7038284 | Methods for making a dielectric stack in an integrated circuit | Jarmo Skarp, Marko Tuominen | 2006-05-02 |
| 6933225 | Graded thin films | Christiaan J. Werkhoven, Ivo Raaijmakers | 2005-08-23 |
| 6902763 | Method for depositing nanolaminate thin films on sensitive surfaces | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2005-06-07 |