Issued Patents All Time
Showing 26–50 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430655 | Low temperature high-quality dielectric films | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick | 2022-08-30 |
| 11421324 | Hardmasks and processes for forming hardmasks by plasma-enhanced chemical vapor deposition | Jui-Yuan Hsu, Krishna Nittala, Karthik Janakiraman | 2022-08-23 |
| 11335690 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Nancy Fung, Eswaranand Venkatasubramanian +2 more | 2022-05-17 |
| 11332376 | Diamond-like carbon film | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick | 2022-05-17 |
| 11270905 | Modulating film properties by optimizing plasma coupling materials | Eswaranand Venkatasubramanian, Edward Haywood, Samuel E. Gottheim, Kien N. Chuc, Adam J. Fischbach +2 more | 2022-03-08 |
| 11236418 | Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing | Rui Cheng, Abhijit Basu Mallick | 2022-02-01 |
| 11227797 | Film deposition using enhanced diffusion process | Shishi Jiang, Kurtis Leschkies, Abhijit Basu Mallick | 2022-01-18 |
| 11177128 | Apparatus and methods for manufacturing semiconductor structures using protective barrier layer | Abhijit Basu Mallick, Kurtis Leschkies, Steven Verhaverbeke, Shishi Jiang | 2021-11-16 |
| 11158507 | In-situ high power implant to relieve stress of a thin film | Eswaranand Venkatasubramanian, Abhijit Basu Mallick, Srinivas Gandikota | 2021-10-26 |
| 11131015 | High pressure oxidation of metal films | Amrita B. Mullick, Abhijit Basu Mallick | 2021-09-28 |
| 11062939 | High bias deposition of high quality gapfill | Samuel E. Gottheim, Eswaranand Venkatasubramanian, Abhijit Basu Mallick | 2021-07-13 |
| 11043372 | High-density low temperature carbon films for hardmask and other patterning applications | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Yang Yang, Kartik Ramaswamy, Takehito Koshizawa +2 more | 2021-06-22 |
| 11043379 | Conformal carbon film deposition | Abhijit Basu Mallick | 2021-06-22 |
| 11028477 | Bottom-up gap-fill by surface poisoning treatment | Mark Saly, Keiichi Tanaka, Eswaranand Venkatasubramanian, Mandyam Sriram, Bhaskar Jyoti Bhuyan +2 more | 2021-06-08 |
| 11011384 | Gapfill using reactive anneal | Abhijit Basu Mallick, Shishi Jiang | 2021-05-18 |
| 10954129 | Diamond-like carbon as mandrel | Takehito Koshizawa, Eswaranand Venkatasubramanian, Chi-Pin Lu, Chi-I Lang, Nancy Fung +1 more | 2021-03-23 |
| 10950498 | Selective and self-limiting tungsten etch process | Susmit Singha Roy, Srinivas Gandikota, Abhijit Basu Mallick | 2021-03-16 |
| 10910381 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Nancy Fung, Eswaranand Venkatasubramanian +2 more | 2021-02-02 |
| 10886140 | 3D NAND etch | Shishi Jiang, Bo Qi, Abhijit Basu Mallick, Rui Cheng, Tomohiko Kitajima +2 more | 2021-01-05 |
| 10840088 | Low temperature high-quality dielectric films | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick | 2020-11-17 |
| 10818490 | Controlled growth of thin silicon oxide film at low temperature | Shishi Jiang, Kurtis Leschkies, Abhijit Basu Mallick, Steven Verhaverbeke | 2020-10-27 |
| 10811303 | Methods for gapfill in high aspect ratio structures | Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more | 2020-10-20 |
| 10784107 | Methods of forming tungsten pillars | Abhijit Basu Mallick, Yihong Chen, Ziqing Duan, Rui Cheng, Shishi Jiang | 2020-09-22 |
| 10745282 | Diamond-like carbon film | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick | 2020-08-18 |
| 10741435 | Oxidative volumetric expansion of metals and metal containing compounds | Susmit Singha Roy, Yihong Chen, Kelvin Chan, Abhijit Basu Mallick, Srinivas Gandikota | 2020-08-11 |