Issued Patents All Time
Showing 51–75 of 100 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9255322 | Substrate processing system having symmetric RF distribution and return paths | Donny Young, Alan A. Ritchie, Muhammad M. Rasheed | 2016-02-09 |
| 9249500 | PVD RF DC open/closed loop selectable magnetron | — | 2016-02-02 |
| 9177763 | Method and apparatus for measuring pressure in a physical vapor deposition chamber | Muhammad M. Rasheed, Alan A. Ritchie, Isaac Porras | 2015-11-03 |
| 9062379 | Wafer processing deposition shielding components | Martin Lee Riker, Anantha K. Subramani | 2015-06-23 |
| 8920613 | Offset magnet compensation for non-uniform plasma | Christopher L. Boitnott | 2014-12-30 |
| 8911601 | Deposition ring and electrostatic chuck for physical vapor deposition chamber | Muhammad M. Rasheed, Rongjun Wang | 2014-12-16 |
| 8907222 | Adjustable cover for conductors and insulators | Mark Stransky, Mark Burns, Robert K. Peterson, Bryan Casenhiser | 2014-12-09 |
| 8901429 | Dimensionally adjustable cover for conductors and insulators | Mark Burns, Robert K. Peterson, Tom Haic, Randy Cloud | 2014-12-02 |
| 8900427 | Homing device for magnetron rotating on two arms | Michael Allen Flanigan, Hari Ponnekanti | 2014-12-02 |
| 8901428 | Movably adjustable cover for conductors and insulators | Mark Stransky, Mark Burns, Robert K. Peterson, Randy Cloud, Thomas Martin Haic | 2014-12-02 |
| 8864446 | Wear pin gap closure detection system for gas turbine engine | Ram Bahadur Singh, David L. Wasdell | 2014-10-21 |
| 8795487 | Physical vapor deposition chamber with rotating magnet assembly and centrally fed RF power | Alan A. Ritchie | 2014-08-05 |
| 8764949 | Prediction and compensation of erosion in a magnetron sputtering target | Daniel C. Lubben | 2014-07-01 |
| 8757067 | Railroad well car with open truss sides | — | 2014-06-24 |
| 8702918 | Apparatus for enabling concentricity of plasma dark space | Alan A. Ritchie, Donny Young, Muhammad M. Rasheed, Steve Sansoni, Uday Pai | 2014-04-22 |
| 8696878 | Wafer processing deposition shielding components | Martin Lee Riker, Anantha K. Subramani | 2014-04-15 |
| 8685215 | Mechanism for continuously varying radial position of a magnetron | Anantha K. Subramani, Maurice E. Ewert, Tza-Jing Gung, Hong Yang, Vincent E. Burkhart | 2014-04-01 |
| 8580094 | Magnetron design for RF/DC physical vapor deposition | Rongjun Wang, Sally S. Lou, Muhammad M. Rasheed, Jianxin Lei, Xianmin Tang +4 more | 2013-11-12 |
| 8573932 | Compressor blade root heating system | Christopher W. Ross | 2013-11-05 |
| 8559159 | Electrostatic chuck and methods of use thereof | Shambhu N. Roy, Martin Lee Riker, Vijay D. Parkhe, Steven V. Sansoni | 2013-10-15 |
| 8518220 | Method for predicting and compensating erosion in a magnetron sputtering target | Daniel C. Lubben | 2013-08-27 |
| 8500963 | Sputtering of thermally resistive materials including metal chalcogenides | Mengqi Ye, Peijun Ding, Goichi Yoshidome, Rong Tao | 2013-08-06 |
| 8435379 | Substrate cleaning chamber and cleaning and conditioning methods | Vineet Haresh Mehta, Karl M. Brown, John Pipitone, Daniel J. Hoffman, Steven C. Shannon +1 more | 2013-05-07 |
| 8187416 | Interior antenna for substrate processing chamber | Genhua Xu, Shengde Zhong, Mahendra Bhagwat Lokhande | 2012-05-29 |
| 8133360 | Prediction and compensation of erosion in a magnetron sputtering target | Daniel C. Lubben | 2012-03-13 |