Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8187416 | Interior antenna for substrate processing chamber | Keith A. Miller, Genhua Xu, Shengde Zhong | 2012-05-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8187416 | Interior antenna for substrate processing chamber | Keith A. Miller, Genhua Xu, Shengde Zhong | 2012-05-29 |